A MEMS Based Visible-NIR Fourier Transform Microspectrometer

机译：基于MEMS的可见近红外傅里叶变换显微光谱仪

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Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100μm under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths.

机译：介绍了一种新型的基于傅里叶变换显微光谱仪（FTS）的面外垂直梳状驱动致动器的设计，制造和特性。该光谱仪利用共振模式垂直梳状致动器作为可变深度衍射光栅和单个光电检测器来监测衍射图的0阶。通过将0阶强度作为光程差的函数进行傅立叶变换，可以计算出照射光栅的光源的光谱。垂直梳状致动器在大气压下具有28V激励时的行程范围为100μm，这在可见光下产生的理论光谱分辨率为0.5nm，在电信波长下产生的理论光谱分辨率优于5nm。

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来源
《MEMS, MOEMS, and Micromachining II》|2006年|P.61860C.1-61860C.9|共9页
会议地点 Strasbourg(FR)
作者
C. Ataman; H. Urey; S.O. Isikman; A. Wolter;
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作者单位

Optical Microsystems Laboratory, Department of Electrical Engineering, Koc University Rumeli Feneri Yolu, 34450, Sariyer, Istanbul, TURKEY;

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会议组织
原文格式 PDF
正文语种 eng
中图分类真空电子技术;
关键词
comb actuation; fourier transform spectroscopy; MEMS; diffraction grating;

机译：梳状驱动傅里叶变换光谱MEMS衍射光栅;

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机译：傅里叶变换显微光谱仪的大行程电热MEMS反射镜的建模与控制
2. An electromagnetically driven lamellar grating based Fourier transform microspectrometer [J] . Yu Hongbin, Zhou Guangya, Chau Fook Siong, Journal of Micromechanics and Microengineering . 2008,第5期

机译：基于电磁驱动的层状光栅的傅里叶变换显微光谱仪
3. An electromagnetically driven lamellar grating based Fourier transform microspectrometer [J] . Yu HB, Zhou GY, Siong CF, Journal of Micromechanics and Microengineering . 2008,第5期

机译：基于电磁驱动的层状光栅的傅里叶变换显微光谱仪
4. A MEMS based visible-NIR Fourier transform microspectrometer [C] . C. Ataman, H. Urey, S. O. Isikman, Conference on MEMS, MOEMS and Micromachining . 2006

机译：基于MEMS的可见NIR傅里叶变换微旋光器
5. Imaging Fourier Transform Spectroscopy from a Space Based Platform -- The Herschel/SPIRE Fourier Transform Spectrometer. [D] . Spencer, Locke Dean. 2009

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6. Review of MEMS Based Fourier Transform Spectrometers [O] . Junyu Chai, Kun Zhang, Yuan Xue, 2020

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7. Fourier Transform Infrared (FTIR) Spectroscopy, Attenuated Total Reflectance Fourier Transform Infrared (ATR–FTIR) Spectroscopy, Micro–Attenuated Total Reflectance Fourier Transform Infrared (Micro–ATR–FTIR) Spectroscopy, Macro–Attenuated Total Reflectance Fourier Transform Infrared (Macro–ATR–FTIR) Spectroscopy, Two–Dimensional Infrared Correlation Spectroscopy, Linear Two–Dimensional Infrared Spectroscopy, Non–Linear Two–Dimensional Infrared Spectroscopy, Atomic Force Microscopy Based Infrared (AFM–IR) Spectroscopy, Infrared Photodissociation Spectroscopy, Infrared Correlation Table Spectroscopy, Near–Infrared Spectroscopy (NIRS), Mid–Infrared Spectroscopy (MIRS), Nuclear Resonance Vibrational Spectroscopy, Thermal Infrared Spectroscopy and Photothermal Infrared Spectroscopy Comparative Study on Malignant and Benign Human Cancer Cells and Tissues under Synchrotron Radiation with the Passage of Time [O] . Alireza Heidari 2018

机译：傅里叶变换红外（FTIR）光谱，衰减总反射率傅里叶变换红外（ATR-FTIR）光谱，微衰减总反射率傅里叶变换红外（微ATR-FTIR）光谱，宏观衰减总反射率傅立叶变换红外（宏观 - ATR - ftir）光谱，二维红外相关光谱，线性二维红外光谱，非线性二维红外光谱，原子力显微镜的红外（AFM-IR）光谱，红外线光度分离光谱，红外相关表光谱，附近-Infarred光谱学（NIRS），中红外光谱（MIR），核共振振动光谱，热红外光谱和光热红外光谱比较对比较的恶性和良性人体癌细胞和组织在时滞辐射下的时间流逝
8. Image-Based Method for Modeling the Elasto-Plastic Behavior of Polycrystalline Microstructures Based on the Fast Fourier Transform. [R] . Wen, B., Zabaras, N. 2012

机译：基于图像的快速傅里叶变换建模多晶微结构弹塑性行为的方法。

A MEMS Based Visible-NIR Fourier Transform Microspectrometer

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