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Microspectroscopy with Terahertz BioMEMS

机译：太赫兹生物MEMS的显微光谱

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摘要

Biological applications require more and more compact, sensitive and reliable microsystems. We will present solutions in order to realize a "microspectroscopy" up to Terahertz frequencies of various biological entities (living cell, neurons, proteins...). We investigate these entities in liquid phase. In a recent work, we have demonstrated a solution to excite efficiently a single wire transmission line. The propagation mode is similar to a surface plasmon and known as a Goubau-mode. The wire we used is extremely thin compared to other recent solutions at terahertz frequencies. There are three orders of magnitude in the size of the wire used by K. Wang and D.M. Mittleman. Typically the wire's width is 1μm compared to the 900μm diameter metal wire in [3]. Moreover our solution is in a planar configuration which is more suitable for microfluidic applications. We benefit from the high confinement of the electromagnetic field around this very thin gold wire to optimize the sensitivity of these Terahertz BioMEMS. Microfluidic channels are placed below the strip in a perpendicular direction. We will first present some properties of the Planar Goubau-Line (PGL) and the measurements results obtained with structures fabricated on glass and quartz substrates. In a last part resonant structures and Mach-Zehnder type interferometers will also be presented.
机译：生物应用需要越来越多的紧凑，灵敏和可靠的微系统。我们将提出解决方案，以实现各种生物实体（活细胞，神经元，蛋白质等）的高达太赫兹频率的“显微光谱”。我们在液相中研究这些实体。在最近的工作中，我们已经展示了一种有效激发单线传输线的解决方案。传播模式类似于表面等离子体激元，称为Goubau模式。与其他最新解决方案相比，我们在太赫兹频率下使用的电线非常细。 K. Wang和D.M.使用的电线尺寸有三个数量级。米特尔曼。与[3]中直径为900μm的金属线相比，线的宽度通常为1μm。此外，我们的解决方案为平面配置，更适合微流体应用。我们受益于围绕这根非常细的金线的电磁场的高度限制，以优化这些太赫兹BioMEMS的灵敏度。微流体通道在垂直方向上位于条带下方。我们将首先介绍平面Goubau线（PGL）的一些特性以及在玻璃和石英基板上制造的结构获得的测量结果。最后，还将介绍谐振结构和Mach-Zehnder型干涉仪。

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