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Parallel Atomic Force Microscopy using Optical Heterodyne Detection

机译：使用光学外差检测的平行原子力显微镜

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We report on an array of atomic force microscopes (AFM) based on a simple optical set-up using heterodyne detection. The deflection of AFM cantilevers is given by the path differences between the reference and the measuring wave in a Michelson interferometer. A matrix of micro-lenses is placed just above the cantilevers, in such a way that the deflected light from each cantilever is collected by one micro-lens. Both the micro-lenses and the cantilever chips are previously glued to increase the robustness of the system. The interference between the light from each micro-lenses and the reference light is selected by a diaphragm and subsequently detected by a photodetector. This procedure is repeated for each cantilever. In order to validate our instrument we measure the profile of a binary grating having a step height of 19.66 nm. By a piezoelectric platform a lateral range of 10 μm was scanned with a speed of 1 μm/s and an integration time of 10 ms, which leads to a lateral resolution of 10 nm. The profiles measured by the cantilevers are in good agreement with the profile of the sample grating.
机译：我们基于使用外差检测的简单光学设置，报告了一系列原子力显微镜（AFM）。 AFM悬臂的挠度由迈克尔逊干涉仪中参考波和测量波之间的路径差给出。微透镜矩阵恰好位于悬臂的上方，以使来自每个悬臂的偏转光被一个微透镜收集。预先将微透镜和悬臂芯片粘合在一起，以增加系统的坚固性。来自每个微透镜的光和参考光之间的干涉通过光阑选择，然后由光电探测器检测。对每个悬臂重复此过程。为了验证我们的仪器，我们测量了步长为19.66 nm的二元光栅的轮廓。通过压电平台，以1μm/ s的速度和10 ms的积分时间扫描10μm的横向范围，从而得到10 nm的横向分辨率。悬臂测量的轮廓与样品光栅的轮廓非常吻合。

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