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首页> 外文会议>MEMS/MOEMS Components and Their Applications III >Extreme Adaptive Optics Testbed: Performance and Characterization of a 1024-MEMS Deformable Mirror
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Extreme Adaptive Optics Testbed: Performance and Characterization of a 1024-MEMS Deformable Mirror

机译：极端自适应光学测试台：1024 MEMS可变形反射镜的性能和特性

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摘要

We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.
机译：我们已经证明，微电子机械系统（MEMS）的可变形反射镜可以在9.2毫米孔径内的可控空间频率内展平到<1 nm RMS，这使其成为高对比度自适应光学系统（也称为极限自适应光学）的可行选择）。加州大学圣克鲁斯分校的极限自适应光学测试台用于研究和开发高对比度成像技术，尤其是波前控制。相移衍射干涉仪（PSDI）以亚纳米级的精度和精确度来测量波阵面误差，以进行计量和波阵面控制。一致的展平度，要求的测试和各个执行器响应的特性描述，包括死响应和低响应执行器的影响。还测试了MEMS器件的稳定性和可重复性。 MEMS闭环性能的误差预算将总结MEMS的特性。

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