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首页> 外文会议>MEMS/MOEMS Components and Their Applications III >Large-Stroke Self-Aligned Vertical Comb Drive Actuators for Adaptive Optics Applications
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Large-Stroke Self-Aligned Vertical Comb Drive Actuators for Adaptive Optics Applications

机译：大行程自对准垂直梳状驱动器，用于自适应光学应用

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摘要

A high-stroke micro-actuator array was designed, modeled, fabricated and tested. Each pixel in the 4x4 array consists of a self-aligned vertical comb drive actuator. This micro-actuator array was designed to become the foundation of a micro-mirror array that will be used as a deformable mirror for adaptive optics applications. Analytical models combined with CoventorWare® simulations were used to design actuators that would move up to 10μm in piston motion with 100V applied. Devices were fabricated according to this design and testing of these devices demonstrated an actuator displacement of 1.4μm with 200V applied. Further investigation revealed that fabrication process inaccuracy led to significantly stiffer mechanical springs in the fabricated devices. The increased stiffness of the springs was shown to account for the reduced displacement of the actuators relative to the design.
机译：设计，建模，制造和测试了高行程微执行器阵列。 4x4阵列中的每个像素都包含一个自对准垂直梳状驱动器致动器。这种微致动器阵列被设计成为微镜阵列的基础，该微镜阵列将用作自适应光学应用的可变形镜。分析模型与CoventorWare®仿真相结合，用于设计在施加100V电压时，活塞运动最多可移动10μm的执行器。根据这种设计制造的器件和对这些器件的测试表明，施加200V电压时执行器位移为1.4μm。进一步的调查表明，制造工艺的不精确性导致所制造的设备中的机械弹簧明显变硬。弹簧的刚度增加表明，促动器相对于设计的位移减小了。

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