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Study on Application and Analysis of a Microaccelerometer with Magnetorheological Fluids

机译：磁流变液微加速度计的应用与分析研究

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摘要

A new type microaccelerometer with magnetorheological (MR) fluids is presented in this paper. MR fluids can easily change from a fluid state to a semi-solid state in milliseconds when exposed to magnetic field. They are applied to the microaccelerometer where the MR fluids can vary the relative dielectric constant and provide damping. Then the electrostatic force has been adopted in the microaccelerometer for balancing force. Therefore, the measurement range of the microaccelerometer will be expanded. The mathematical model of the microaccelerometer with MR fluids is derived. The curve of the accelerometer between the deflection of the silicon doubly-supported beam and voltage has been simulated. The curves of the accelerometer between the voltage and the acceleration are also got. Last, the stability of the microaccelerometer system has been analyzed.
机译：本文提出了一种新型的带有磁流变（MR）流体的微加速度计。当暴露于磁场中时，MR流体可以在几毫秒内轻松地从流体状态变为半固态。它们被应用于微加速度计，其中MR流体可以改变相对介电常数并提供阻尼。然后在微加速度计中采用了静电力来平衡力。因此，微加速度计的测量范围将得到扩展。推导了带有MR流体的微加速度计的数学模型。模拟了硅双支撑梁的挠度和电压之间的加速度计曲线。得到了加速度计在电压和加速度之间的曲线。最后，分析了微加速度计系统的稳定性。

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