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Microfluid Oscillator Based on Thermo-capillarity

机译：基于热毛细管的微流体振荡器

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A novel micro fluid oscillator with a boron diffused resistor is proposed in this paper. The actuation principle is based on the combination of Marangoni effect. The contemporary microfabrication technique enables us to fabricate microheater tiny enough to control temperature so quickly and precisely in micro length scale. The devices exhibiting the Marangoni effect in square channels were designed and fabricated from one silicon substrate and two quartz substrates. And the three substrates were aligned, bonded and packaged for testing. In this actuator there is a pair of micro-heaters to produce a thermal gradient along the slit. The driving wattage is about 0.1W and the resistors can make a temperature difference about 100 degrees during 0.1s with a pulsewidth of 20us for 0.1A current pulses. Then the movement is driven towards the lower temperature direction by the interfacial tension of the air-liquid interface. This micro fluid actuator can play important role in many liquid micro-systems such as in micromotor and micro valve.
机译：本文提出了一种新型的带有硼扩散电阻的微流体振荡器。驱动原理是基于马兰戈尼效应的组合。当代的微细加工技术使我们能够制造微细的微加热器，从而以微长的尺度快速而精确地控制温度。由一个硅衬底和两个石英衬底设计和制造在方形通道中表现出Marangoni效应的器件。然后将三个基板对齐，粘合并封装以进行测试。在该致动器中，有一对微型加热器，可沿着缝隙产生热梯度。驱动瓦数约为0.1W，电阻器在0.1s内可产生约100度的温差，对于0.1A电流脉冲，其脉冲宽度为20us。然后，通过气液界面的界面张力将运动朝着较低温度方向驱动。这种微流体致动器可以在许多液体微系统中发挥重要作用，例如在微电机和微阀中。

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