Study on the Performance of Gas Journal Bearings for Power MEMS

机译：功率MEMS气体轴颈轴承性能研究。

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Gas journal bearings, which are used to support radial loads in a rotating machine, have somewhat unusual requirements in Power MEMS deriving from the extremely shallow structures. With the reference Knudsen number being included, the modified Reynolds equation for gas journal bearings based on Burgdorfer's first order slip boundary condition is put forward. The boundary condition for modified Reynolds equation is given. The numerical method is employed to solve the modified Reynolds equation to obtain the pressure profiles, load capacities and attitude angles of gas journal bearings for Power MEMS under different reference Knudsen numbers and eccentricity ratios. Numerical analysis shows that the pressure profiles and non-dimensional load capacities decrease obviously with the reference Knudsen number increasing, and the attitude angle changes conversely. Moreover, when the eccentricity ratio is smaller, the effect of gas rarefaction on the attitude angle is less.

机译：气体轴颈轴承用于支撑旋转机械中的径向载荷，由于其极浅的结构，在Power MEMS中存在一些不寻常的要求。在包括参考努森数的基础上，提出了基于伯格格多夫一阶滑移边界条件的气轴颈轴承改进的雷诺方程。给出了修正的雷诺方程的边界条件。采用数值方法求解修正的雷诺方程，得到在不同的参考努数和偏心率的情况下，用于动力MEMS的气体轴颈轴承的压力分布，负载能力和姿态角。数值分析表明，随着参考努森数的增加，压力分布和无量纲承载力明显减小，且姿态角反之。此外，当偏心率比较小时，气体稀化对姿态角的影响较小。

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来源
《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.635-639|共5页
会议地点 Xian(CN);Xian(CN)
作者
Haijun Zhang; Qin Yang;
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作者单位

College of Mechanical-Electrical Engineering, Jiaxing University, Jiaxing, Zhejiang Province, China;

College of Mathematics Physics and Information Engineering, Jiaxing University, Jiaxing, Zhejiang Province, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;微电子学、集成电路（IC）;
关键词
gas journal bearing; power MEMS; reference knudsen number; modified reynolds equation;

机译：气体轴颈轴承；功率MEMS;参考努数修正的雷诺方程;

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Study on the Performance of Gas Journal Bearings for Power MEMS

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