Design and Simulation of Electromagnetic Two-dimensional MOEMS Scanning Mirror

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.185-189|共5页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  ZHANG Chi; YOU Zheng; HUANG Hu;

  展开▼
• 作者单位

  State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China;

  State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China;

  State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  MOEMS; scanning mirror; electromagnetic; FEM simulation;

  机译：MOEMS；扫描镜电磁;有限元模拟;