Fabrication of Silicon Nano-wire by Oxidation

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.565-568|共4页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Xiaofei Wang; Yufei Zhang; Kan Yu; Xiaomei Yu;

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• 作者单位

  Institute of Microelectronics, Peking University, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing 100871, China;

  School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China;

  Institute of Microelectronics, Peking University, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing 100871, China;

  School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China,Institute of Microelectronics, Peking University, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing 100871, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  silicon nano-wire; thermal oxidation; lateral diffusion; nanospintronics devices;

  机译：硅纳米线；热氧化横向扩散纳米自旋电子器件;