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首页> 外文会议>Metrology, Inspection, and Process Control for Microlithography XX pt.1 >Metrology Tool Fleet Management: A Comprehensive Discussion of Requirements and Solutions
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Metrology Tool Fleet Management: A Comprehensive Discussion of Requirements and Solutions

机译：计量工具车队管理：需求和解决方案的全面讨论

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摘要

Managing a fleet of metrology tools is becoming an extremely daunting task. This is especially so in manufacturing lines where it is not unusual to have many tools in the fleet and a very large mix of product and technologies. It is this large mix of product and technologies which pushes the number of recipes created into the thousands. Combine the large number of recipes with a poorly calibrated, monitoring and managed fleet of tools and productivity can be negatively impacted many ways. In this paper, these productivity detractors are explained in more detail to help understand the numerous ways a fleet of metrology tools can negatively impact the productivity of the manufacturing and development lines. In the pursuit of reducing metrology tool induced productivity detractors, the concept of metrology tool fleet management is presented. Categories of fleet management are also introduced along with a comprehensive discussion of requirements. It is hoped that this discussion of requirements and solutions concerning the metrology tool fleet management concept will launch efforts in coordinating the comprehensive solutions needed between suppliers and tool owners. Some recommendations are made regarding long term solutions to needs with respect to integrating fleet management into manufacturing fab systems.
机译：管理一组计量工具正成为一项极为艰巨的任务。在生产线中尤其如此，在生产线中通常不会有很多工具，并且产品和技术的混合非常多。正是这种产品和技术的大量混合，使创建的配方数量成千上万。将大量配方与未经过良好校准，监控和管理的工具组合在一起，会在很多方面对生产率产生负面影响。在本文中，将对这些生产率下降因素进行更详细的说明，以帮助了解计量工具团队对生产线和开发线的生产率产生负面影响的多种方式。为了减少度量工具引起的生产率下降因素，提出了度量工具车队管理的概念。还介绍了车队管理的类别以及对要求的全面讨论。希望有关计量工具车队管理概念的要求和解决方案的讨论将为协调供应商和工具所有者之间所需的综合解决方案做出努力。针对将车队管理集成到制造工厂系统中的需求的长期解决方案，提出了一些建议。

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