Statistical analysis of CD SEM measurement and process control in the indistinguishable multi-process patterns

机译：难以区分的多过程模式下CD SEM测量和过程控制的统计分析

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摘要

As device size is going under the sub-60nanometer scale, lithography is facing its resolution limit. To solve this resolution limit it has been suggested that one critical device layer could be made from multi photo/etch process, which needs tighter overlay and critical dimension (CD) controls than normal single exposure process. For CD control in this multi photo/etch process, the problem is that we do not know which pattern is made from which photo/etch process after final process. This makes it impossible to measure the specific process pattern's CD independently. In this case the conventional CD measuring method, which measures multi CDs in FOV(Field Of View) of SEM(Scanning Electronic Microscope) and control their average and distribution, couldn't know the average difference between both patterns because the variance from simply measured multi CD is just sum of each variance and their cross terms not including the average difference. In this paper it is pointed out the statistical problem of classical multi CD measurement in the indistinguishable multi process pattern and a compensative method is suggested with a new statistical formula.

机译：随着器件尺寸小于60纳米尺度，光刻技术正面临其分辨率极限。为了解决该分辨率极限，已经提出可以通过多次照相/蚀刻工艺来制造一个关键器件层，与常规的单次曝光工艺相比，该工艺需要更严格的覆盖和关键尺寸（CD）控制。对于在该多照片/蚀刻过程中的CD控制，问题在于我们不知道最终过程之后是从哪个照片/蚀刻过程中制成哪种图案。这使得不可能独立地测量特定过程模式的CD。在这种情况下，传统的CD测量方法无法在SEM（扫描电子显微镜）的FOV（视场）中测量多个CD并控制其平均值和分布，因此无法知道两种模式之间的平均差异，因为简单测量的方差multi CD只是每个方差及其交叉项的和，不包括平均差。指出了经典的多CD测量在无法区分的多过程模式下的统计问题，并提出了一种新的统计公式作为补偿方法。

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《Metrology, Inspection, and Process Control for Microlithography XX pt.2》|2006年|P.61522K.1-61522K.7|共7页
会议地点 San JoseCA(US)
作者
Duck-Sun Yang; Myung-Ho Jung; Young-Mi Lee; Cha-Won Koh; Gi-Sung Yeo; Sang-Gyun Woo; Han-Ku Cho; Joo-Tae Moon;
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作者单位

Process Development Team, Semiconductor RD center, Samsung Electronics, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do, 499-711, Korea;

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原文格式 PDF
正文语种 eng
中图分类光刻、掩膜;
关键词
indistinguishable pattern; CD; CD difference; total variance;

机译：不可区分模式; CD; CD差异;总方差;

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3. Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing [J] . G. Tosello, H. N. Hansen, F. Marinello, CIRP Annals . 2010,第1aCDaROM期

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There were 12 participants in the experimental group, 7 female and 5 male, and 12 participants, 7 female and 5 male in the control group. Personal Information Form and Decision Making Style Scale prepared by the researcher were used in the research. In order to decide on the tests to be used in the course of analyzing the data, the scores of the participant's Decision Styles Scale pre-test, which are placed primarily in the experimental and control groups, it was analyzed whether the basic expectations of parametric tests were answered. As a result of the analysis made, the scores, skewness and kurtosis coefficients obtained from the Decision Making Styles Scale were given to the experimental and control groups. It was determined that the distribution was normal in the result of Shapiro-Wilk test, in which the skewness and kurtosis coefficients of each sub-scale were ranked between -1 and +1. Participants in the experimental and control groups; homogeneity test results for decision-style pre-test measurements indicate that the data are homogeneous. According to the results of the Mauchly Globalness Test, it has been determined that working supports the hypothesis. It was determined that there was no significant difference between the pre-test scores obtained from dependent decision-making style of experiment and control groups, but the test group showed lower mean scores at the significant level within the scores of post-test and follow-up tests. Therefore, it can be said that the ACT-oriented psychoeducation program applied to the experimental group reduces the dependent decision-making style scores from the decision style sub-dimensions and the psychoeducation program has a lasting effect. 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The pre-test scores obtained from the rational decision-making style of the experimental and control groups showed that there was a difference between the post-test and the follow-up scores, but this difference was not significant. As a result of the analysis, it was determined that the test group had higher levels of rational decision style than the pre - test scores in the post test and follow - up scores, whereas the post test and follow - up test scores in the control group rational decision style showed a decrease compared to the pre - test scores. the pre - test scores. Decision-making Styles Scale Avoidant Decision Making As a result of the analysis of the mean scores of the subscale scores of pre-test, post-test and follow-up measures, the group effect was found to be insignificant. 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8. Semiconductor Measurement Technology: The Design, Testing, and Analysis of a Comprehensive Test Pattern for Measuring CMOS/SOS Process Performance and Control [R] . Linholm, L. W. 1981

机译：半导体测量技术：用于测量CmOs / sOs工艺性能和控制的综合测试模式的设计，测试和分析

Statistical analysis of CD SEM measurement and process control in the indistinguishable multi-process patterns

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