DOPANT MAPPING AND STRAIN ANALYSIS IN B DOPED SILICON STRUCTURES USING MICRO-RAMAN SPECTROSCOPY

著录项

• 来源
  《Microelectromechanical structures for materials research》|1998年|239-244|共6页
• 会议地点 San Francisco CA(US)
• 作者

  M. Bowden; D. J. Gardiner; M. A. Lourenco; J. Hedley; D. Wood; J. S. Burdess; A. J. Harris;

  展开▼
• 作者单位

  Department of Chemical and Life Sciences, University of Northumbria at Newcastle, Ellison Place, Newcastle upon Tyne, NE1 8ST, UK;

  Department of Chemical and Life Sciences, University of Northumbria at Newcastle, Ellison Place, Newcastle upon Tyne, NE1 8ST, UK;

  Department of Chemical and Life Sciences, University of Northumbria at Newcastle, Ellison Place, Newcastle upon Tyne, NE1 8ST, UK;

  School of Engineering, University of Durham, South Road, Durham, DH1 3LE, UK;

  School of Engineering, University of Durham, South Road, Durham, DH1 3LE, UK;

  Department of Mechanical Engineering, Newcastle University, Stephenson Building, Newcastle upon Tyne, NE1 7RU, UK;

  Department of Mechanical Engineering, Newcastle University, Stephenson Building, Newcastle upon Tyne, NE1 7RU, UK;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 结构;材料;
• 关键词