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首页> 外文会议>Microelectronics Technology and Devices-SBMicro 2008 >DIFFRACTIVE OPTICAL ELEMENTS BASED IN BRAND GLASS
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DIFFRACTIVE OPTICAL ELEMENTS BASED IN BRAND GLASS

机译：基于品牌玻璃的衍射光学元件

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摘要

A Diffractive Optical Element (DOE) based in optical glass substrate was developed in this work. DOEs are lighter, occupy a relatively smaller volume and they can be fabricated using microelectronic processes. These devices had been built by glass etching: first, glass substrate was submitted to a cleanness process; after it was carried through a process of evaporation of an aluminum mask, which will be used to format the device. Before the etching process, a small layer of photo resist was deposited on aluminum, a lithographic process and wet process defines a pattern on the aluminum layer. Plasma etching was made by RIE (Reactive Ion Etching) equipment, remaining the diffractive patterns. The characterizations of these devices are performed by optical analyzes with a 633 nm HeNe laser. The roughness and etch rate of materials after etch process were obtained by Atomic Force Microscopy and high step meter.
机译：在这项工作中开发了基于光学玻璃基板的衍射光学元件（DOE）。 DOE较轻，体积相对较小，可以使用微电子工艺制造。这些设备是通过玻璃蚀刻制成的：首先，对玻璃基板进行清洁处理；然后进行蒸镀铝面罩的过程，该过程将用于格式化设备。在蚀刻工艺之前，一小层光致抗蚀剂沉积在铝上，光刻工艺和湿法工艺在铝层上定义了图案。通过RIE（反应离子蚀刻）设备进行等离子体蚀刻，保留了衍射图案。这些设备的表征是通过使用633 nm HeNe激光器进行光学分析来进行的。通过原子力显微镜和高阶仪获得蚀刻过程后材料的粗糙度和蚀刻速率。

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  • 来源
  • 会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
  • 作者

    M. Sparvoli; R. D. Mansano; J. F. D. Chubaci;

  • 作者单位

    Laboratorio de Sistemas Integraveis, Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo, Av. Prof. Luciano Gualberto, trav. 3,153, 05508-900, Sao Paulo, SP, Brasil;

    Laboratorio de Sistemas Integraveis, Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo, Av. Prof. Luciano Gualberto, trav. 3,153, 05508-900, Sao Paulo, SP, Brasil;

    Laboratorio de Sistemas Integraveis, Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo, Av. Prof. Luciano Gualberto, trav. 3,153, 05508-900, Sao Paulo, SP, Brasil;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
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