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Enhancement of structural stiffness in MEMS structures

机译:增强MEMS结构的结构刚度

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Many optical applications require smooth micromirror reflective surfaces with large radius of curvature. Usually when using surface micromachining technology and as a result of residual stress and stress gradient in thin films, the control of residual curvature is a difficult task. In this work, two engineering approaches were developed to enhance structural stiffness of micromirrors. 1) By integrating stiffening structures and thermal annealing. The stiffening structures consist of U-shaped profiles integrated with the mirror (dimension 200x300 μm~2). 2) By combining selective electroplating and flip-chip based technologies. Nickel was used as electroplated material with optimal stress values around ±10 MPa for layer thicknesses of about 10 μm. With the former approach, typical curvature radii of about 1.5 cm and 0.6 cm along mirror width and length were obtained, respectively. With the latter approach, an important improvement in the micromirror planarity and flatness was achieved with curvature radius up to 23 cm and roughness lower than 5 nm rms for typical 1000x1000 μm~2. micromirrors.
机译:许多光学应用需要具有大曲率半径的光滑微镜反射表面。通常,当使用表面微加工技术时,由于薄膜中的残余应力和应力梯度,控制残余曲率是一项艰巨的任务。在这项工作中,开发了两种工程方法来增强微镜的结构刚度。 1)通过整合加强结构和热退火。加强结构包括与镜子集成的U形轮廓(尺寸为200x300μm〜2)。 2)通过结合选择性电镀和基于倒装芯片的技术。镍用作电镀材料,对于约10μm的层厚度,其最佳应力值约为±10 MPa。使用前一种方法,沿镜的宽度和长度分别获得约1.5 cm和0.6 cm的典型曲率半径。通过后一种方法,对于典型的1000x1000μm〜2,曲率半径高达23 cm,粗糙度小于5 nm rms,微镜平面性和平坦度得到了重要的改善。微镜。

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