Abstract: Novel optical and optoelectronic technologies make it possible to provide real-time, highly precise metrological tools for microsystems fabrication. Custom light sources with unprecedented efficiency, polymer replication of micro-optical components, optical monoblocks of glass or polymers comprising many optical functions, assembly techniques adopted from microelectronics and smart CMOS photosensors are the basis of this development. It is illustrated with three practical examples: (1) An absolute, high-precision, low-cost optical encoder, (2) low-noise, low-power and high-speed minicameras, and (3) real-time range imaging with micron resolution based on low-coherence optical tomography. !20
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