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Planar Extrinsic Biasing Of Thin Film Shape-Memory MEMS Actuators

机译：薄膜形状记忆MEMS执行器的平面外部偏置

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摘要

Although slow and dissipative, sputtered thin-film shape-memory alloys like equiatomic titanium-nickel can exert a large ohmically-excited force-displacement product when deployed in photolithographically micromachined actuators. They give energy densities far exceeding those typically produced by competing microactuator materials, and their size can probably be scaled down to the nanometer range (where the benefits of high surface to volume ratio are best exploited for speed and efficiency). But a large, energetic, and resettable actuation stroke is possible only if some agency has imparted a non-trivial initial plastic strain, of between one and five percent, to the martensite phase. Is not always obvious how this strain is to be achieved when discrete mechanical manipulation of the active element is difficult. Furthermore, for cyclic actuation, a resetting-force that periodically re-deforms the martensite during the cooling interval must arise naturally from mechanical elements in the design. Here, several methods responding these requirements are discussed in relation to various kinematic themes.
机译：尽管缓慢而耗散，但是当在光刻微机械执行器中部署时，溅射的薄膜形状记忆合金（如等原子钛镍合金）会产生大的欧姆激发力位移产物。它们提供的能量密度远远超过竞争微致动器材料通常产生的能量密度，并且它们的尺寸可能会缩小到纳米范围（在高速度和效率方面最好利用高表面积体积比的优势）。但是，只有在某些机构对马氏体相赋予不小的初始塑性应变（介于1-5％之间）的情况下，才可能实现大的，充满活力的且可重置的致动冲程。当很难对有源元件进行离散的机械操作时，如何实现这种应变并不总是很明显。此外，对于循环致动，设计中的机械元件自然必须产生在冷却间隔期间周期性地使马氏体变形的复位力。在此，针对各种运动学主题讨论了满足这些要求的几种方法。

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