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首页> 外文会议>Nanoengineering: Fabrication, properties, optics, and devices VII >Femtosecond Laser Direct Writing of Nanoscale Silicon Lines
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Femtosecond Laser Direct Writing of Nanoscale Silicon Lines

机译：飞秒激光直接写入纳米级硅线

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摘要

Direct writing using a femtosecond laser provides an accurate, repeatable and efficient means of creating nanoscale lines for electronic applications circumventing the standard fabrication methods that require expensive masks and numerous processing steps. Femtosecond laser writing makes these nanoscale lines by using a phase zone plate to focus the laser pulse onto a silicon substrate in a chemical vapor deposition chamber flowing silane. The silane is decomposed onto the narrow heated area of the substrate as the laser scans across leaving behind a thin line of silicon deposition. This manufacturing technique utilizes a high precision optical metrology system and a high precision motion control system to make this nano-manufacturing possible. It has been shown to successfully make as many as 100 silicon lines on the order of a few hundred nanometers in width. The size and crystal structure of these lines are characterized using Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM).
机译：使用飞秒激光的直接写入提供了一种精确，可重复且有效的方式来创建用于电子应用的纳米级线，从而避免了需要昂贵的掩模和大量处理步骤的标准制造方法。飞秒激光写入通过使用相带板将激光脉冲聚焦到化学气相沉积室中流动的硅烷上的硅基板上，从而形成了这些纳米级线。当激光扫过时，硅烷分解到基板的狭窄加热区域上，留下细小的硅沉积线。该制造技术利用高精度光学计量系统和高精度运动控制系统来使这种纳米制造成为可能。业已证明，它可以成功制作多达100条硅线，宽度约为几百纳米。这些线的大小和晶体结构使用扫描电子显微镜（SEM）和透射电子显微镜（TEM）进行表征。

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  • 来源
  • 会议地点 San Diego CA(US)
  • 作者

    James I. Mitchell; Se Jun Park; C. Adam Watson; Pornsak Srisungsitthisunti; Chookiat Tansarawiput; Minghao Qi; E.A. Stach; Chen Yang; Xianfan Xu;

  • 作者单位

    School of Mechanical Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Mechanical Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Mechanical Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Mechanical Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Electrical and Computer Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Electrical and Computer Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Materials Science Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

    rnSchool of Chemistry, Birck Nanotechnology Center, Purdue University,West Lafayette, Indiana 47907;

    rnSchool of Mechanical Engineering, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 特种结构材料;
  • 关键词

    Direct Write; Femtosecond Laser; LCVD; Silicon Nanowire;

    机译：直接写；飞秒激光； LCVD;硅纳米线;

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