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Ultra-Compact MEMS FTIR Spectrometer

机译：超紧凑MEMS FTIR光谱仪

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摘要

Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a self-aligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm"1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.
机译：近年来，便携式和手持式光谱仪正在开发和商业化，它利用了快速发展的技术并触发了现场光谱分析领域的新市场。尽管手持设备已针对近红外光谱（NIRS）进行了商业化，但其尺寸和成本仍然阻碍了光谱仪作为智能手机行业和IoT应用所需的光谱感应组件的部署。在这项工作中，我们报告了一种基于芯片大小的微机电系统（MEMS）的FTIR光谱仪。该解决方案的核心光学引擎是使用无源对准集成技术为自对准MEMS芯片构建的；自对准微光学元件和单个检测器，装在尺寸约为1 cm3的小包装中。 MEMS芯片是采用绝缘体上硅衬底的深反应离子刻蚀技术制造的单片高通量迈克尔逊干涉仪。该微光学部件用于调节去往/来自MEMS的输入/输出光，以及用于进一步将光引导至检测器。由于调节微光学元件的全反射设计，因此性能没有色差。结合硅在红外区域的出色传输特性，该集成解决方案可实现非常宽的光谱范围。报告的传感器的光谱分辨率约为33 cm“ 1，工作在1270 nm至2700 nm范围内；上限受扩展的InGaAs检测器限制。提出的解决方案提供了低成本，低功耗，小尺寸，宽波长范围的NIR光谱所有这些功能都保证了该技术与智能便携式和物联网设备即将出现的需求的兼容性。

著录项

  • 来源
    《Next-Generation Spectroscopic Technologies X》|2017年|102100h.1-102100h.8|共8页
  • 会议地点 Anaheim(US)
  • 作者

    Yasser M. Sabry; Khaled Hassan; Momen Anwar; Mohamed H. Alharon; Mostafa Medhat; George A. Adib; Rich Dumont; Bassam Saadany; Diaa Khalil;

  • 作者单位

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt,Facuity of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt;

    Facuity of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt;

    Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo, Egypt,Facuity of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo, Egypt;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Spectroscopy; IoT; Microoptics; Portable spectrometers; Silicon photonics;

    机译：光谱学;物联网微光学；便携式光谱仪；硅光子学;

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