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首页> 外文会议>Optical Measurement Systems for Industrial Inspection V pt.1; Proceedings of SPIE-The International Society for Optical Engineering; vol.6616 pt.1 >Photon-noise limited distance resolution of optical metrology methods
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Photon-noise limited distance resolution of optical metrology methods

机译：光学计量方法的光子噪声有限距离分辨率

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摘要

Optical metrology methods are classified into three fundamental techniques: Triangulation makes use of different positions of cameras and/or light projectors; interferometry employs standing light wave patterns; time-of-flight uses temporal light modulation. Using the unifying framework of linear shift-invariant system theory, it is shown that in all three cases the phase delay of a harmonic function must be determined. Since the precision of such phase measurements is photon noise limited, the distance resolution and the dynamic range are governed by the same functional relationship for the three fundamental optical metrology methods. This equation is derived under the assumption of Gaussian noise in the photogenerated charges in the photodetector; this assumption is a very valid one for almost all light sources, optical elements and photosensors. The equation for the precision of all types of optical distance measurement techniques contains the method's experimental parameters in a single factor, from which the optimum distance range of each of the three fundamental techniques can be deduced. For interferometry this range is 1 nm - 1 μm for triangulation it is 1 μm -10 m, and for time-of-flight ranging it is > 0.1 m, if visible or near infrared light is used.
机译：光学计量方法分为三种基本技术：三角测量利用相机和/或投光器的不同位置；干涉法采用驻光波模式；飞行时间使用时间光调制。使用线性不变式系统理论的统一框架，表明在所有三种情况下必须确定谐波函数的相位延迟。由于这种相位测量的精度受到光子噪声的限制，因此三种基本光学计量方法的距离分辨率和动态范围受相同的函数关系控制。该公式是在光电探测器的光生电荷中具有高斯噪声的假设下推导的；对于几乎所有光源，光学元件和光电传感器而言，这一假设都是非常有效的假设。所有类型的光学测距技术的精度方程均包含一个因素的方法实验参数，由此可以推论出三种基本技术中每种技术的最佳距离范围。对于干涉测量，此范围为1 nm-1μm（对于三角测量）为1μm-10 m，对于飞行时间范围，如果使用可见光或近红外光，则其范围> 0.1 m。

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