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Lithography simulation employing rigorous solutions to Maxwell's equations

机译：使用严格求解麦克斯韦方程组的光刻模拟

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Abstract: A method of obtaining rigorous solutions to Maxwell's equations for the transmission of light through a photomask, both chrome-based and phase-shifting, is presented. The electromagnetic simulator will predict the transmission of light through the mask taking into account material properties, width, and thickness of the structures on the mask. This electromagnetic simulation will then be incorporated into the software package PROLITH/2 for complete simulation down to the resist level. Examples of lithography simulation using these rigorous solutions will be presented. !26

机译：摘要：提出了一种获得麦克斯韦方程组严格解的方法，该方法用于基于铬的和相移的光通过光掩模的传输。电磁模拟器将考虑到掩模上结构的材料属性，宽度和厚度，来预测光通过掩模的透射率。然后，此电磁仿真将合并到软件包PROLITH / 2中，以进行完整的仿真，直至抗蚀剂级别。将介绍使用这些严格解决方案的光刻仿真示例。！26

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来源
《Optical Microlithography XI》|1998年|p.176-196|共21页
会议地点 Santa Clara CA(US)
作者
Ronald L. Gordon; FINLE Technologies; Inc.; Austin; TX; USA; Chris A. Mack; FINLE Technologies; Inc.; Austin; TX; USA.;
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正文语种 eng
中图分类轻工业、手工业;
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1. A Theoretically Rigorous Full-Wave Finite-Element-Based Solution of Maxwell's Equations From dc to High Frequencies [J] . Zhu J., Jiao D. Advanced Packaging, IEEE Transactions on . 2010,第4期

机译：从直流到高频的麦克斯韦方程组的理论严格全波有限元解决方案
2. Constitutive inconsistency: rigorous solution of Maxwell equations based on a dual approach [J] . Golias N.A., Tsiboukis T.D. IEEE Transactions on Magnetics . 1994,第5期

机译：本构不一致：基于对偶方法的麦克斯韦方程组的严格解
3. Polarimetric Simulations of SAR at L-Band Over Bare Soil Using Scattering Matrices of Random Rough Surfaces From Numerical Three-Dimensional Solutions of Maxwell Equations [J] . Chen K., Tsang L., Chen K., IEEE Transactions on Geoscience and Remote Sensing . 2014,第11期

机译：麦克斯韦方程组数值三维解的随机粗糙表面散射矩阵在裸土上L波段SAR的极化模拟
4. Lithography simulation employing rigorous solutions to Maxwell's equations [C] . Ronald L. Gordon, Chris A. Mack Conference on optical microlithography . 1998

机译：用于麦克斯韦方程的严格解决方案的光刻仿真
5. Simulations of emissivity in passive microwave remote sensing with three-dimensional numerical solutions of Maxwell equations and fast algorithm. [D] . Zhou, Lin. 2003

机译：利用麦克斯韦方程组的三维数值解法和快速算法模拟无源微波遥感中的发射率。
6. From Maxwells Equations to Polarimetric SAR Images: A Simulation Approach [O] . Sidnei J. S. SantAnna, J. C. da S. Lacava, David Fernandes 2008

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7. A Theoretically Rigorous Full-Wave Finite-Element-Based Solution of Maxwell\u27s Equations from DC to High Frequencies [O] . Zhu, Jianfang, Jiao, Dan 2010

机译：从直流到高频的Maxwell \ u27s方程的理论严格全波有限元解决方案
8. Fully Automatic, hp-Adaptive Simulations for Maxwell's Equations [R] . Demkowicz, L. 2004

机译：麦克斯韦方程组的全自动，hp自适应模拟

Lithography simulation employing rigorous solutions to Maxwell's equations

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