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首页> 外文会议>Optical Microlithography XI >Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry
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Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry

机译：通过高分辨率准分子激光量热法表征DUV光学材料的吸收和老化行为

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Abstract: Absorption loss in DUV optics during 193 nm irradiation is investigated by employing a high-resolution calorimetric technique which allows determining both single and two photon absorption coefficients at energy densities of several 10 mJ/cm$+2$/, avoiding a significant thermal load on the samples. UV calorimetry is also employed to investigate laser induced aging phenomena, e.g. color center formation in fused silica or CaF$-2$/. A separation of transient and cumulative effects as a function of intensity can be achieved, giving insight into various loss mechanisms. Moreover, the influence of dielectric coatings on the absorption characteristics is discussed. !13
机译：摘要：采用高分辨率量热技术研究了193 nm辐照下DUV光学器件的吸收损耗，该技术可以确定能量密度为10 mJ / cm $ + 2 $ /的单光子吸收系数和两个光子吸收系数，并避免显着的热加载样品。紫外量热法也用于研究激光诱导的老化现象，例如在熔融石英或CaF $ -2 $ /中形成色心。可以将瞬态和累积效应作为强度的函数进行分离，从而深入了解各种损失机制。此外，讨论了介电涂层对吸收特性的影响。 ！13

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