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Direct in situ GDD measurement in optical coating process

机译:光学镀膜过程中的直接原位GDD测量

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In the presented work a fast frequency domain measurement system to determine group delay (GD) and group delay dispersion (GDD) of optical coatings is proposed. The measurements are performed in situ directly on moving substrates during the thin film coating process. The method is based on a Michelson interferometer, which is equipped with a high power broad band light source and a fast spectrometer. Especially for the production of chirped mirrors it is advantageous to obtain group delay and group delay dispersion data of the last layers. This additional information allows for online corrections of coating errors to enhance the precision of complex interference filters for short pulse applications.
机译:在提出的工作中,提出了一种用于确定光学涂层的群时延(GD)和群时延色散(GDD)的快速频域测量系统。测量是在薄膜涂覆过程中直接在移动的基板上进行的。该方法基于迈克尔逊干涉仪,该干涉仪配备有高功率宽带光源和快速光谱仪。特别是对于of反射镜的生产,获得最后层的群时延和群时延色散数据是有利的。此附加信息允许在线校正涂层错误,以增强短脉冲应用中复杂干涉滤光片的精度。

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