Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation

机译：相位步进干涉法在透射电DIC显微镜下的介电表面评估

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Abstract: The phase stepping technique with dia illumination isproposed to evaluate surface relief of dielectriclayers. An easy implementation is described in acommercially available polarized light interferencemicroscope and experimental results are presented. !16

机译：摘要：提出了一种采用直径照明的相位步进技术来评估介电层的表面起伏。在市售的偏振光干涉显微镜中描述了一种简单的实现方式，并给出了实验结果。！16

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《Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications》|1992年|p.212-221|共10页
会议地点 Warsaw(PL)
作者
Author(s): Malgorzata Sochacka Univ. of Santiago de Compostela (Spain) Warszawa Poland; Franck Le Provost I.U.T. of Angers Angers France.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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机译：对透射光DIC显微镜进行相位步进干涉测量以进行介电表面评估，
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Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation

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