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Influence of deposition conditions of ZnO thin films on their photonic properties

机译：ZnO薄膜的沉积条件对其光子性能的影响

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The effects of deposition conditions (especially lateral position against target during deposition and deposition temperature) on optical properties and structure are presented. The X-ray diffraction (XRD) analysis showed that all the films were polycrystalline with hexagonal structure and preferred orientation in [001] direction perpendicular to the substrate surface. Micro-structure properties as crystallite size and micro-strains were not too influenced by deposition conditions and values of crystallites were evaluated in tens of nanometers and micro-strains were about 10". Film thicknesses obtained from transmittance spectra decreased more than two times with increased lateral position of the samples against the target. Dispersion of the spectral refractive index was observed depending on the sample position in deposition chamber. Smaller dispersion was observed in series containing more redundant oxygen in their structure.

机译：提出了沉积条件（尤其是在沉积过程中相对于靶材的横向位置和沉积温度）对光学性能和结构的影响。 X射线衍射（XRD）分析表明，所有膜都是具有六边形结构的多晶，并且在垂直于基底表面的[001]方向上具有优选的取向。沉积条件对晶体结构的微结构特性（如微晶尺寸和微应变）的影响不太大，微晶的值在数十纳米中评估，微应变约为10“。通过透射光谱获得的膜厚度随厚度的增加而减少了两倍以上样品相对于靶材的横向位置，观察到光谱折射率的散布取决于样品在沉积室中的位置；观察到较小的散布，在其结构中包含更多的冗余氧。

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来源
《Photonics, devices, and systems V》|2011年|p.830618.1-830618.6|共6页
会议地点 Prague(CS)
作者
Netrvalova Marie; Prusakova Lucie; Novak Petr; Sutta Pavol;
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作者单位

New technologies - research centre, University of West Bohemia, Univerzitni 8, 306 14 Plzen,Czech Republic;

New technologies - research centre, University of West Bohemia, Univerzitni 8, 306 14 Plzen,Czech Republic;

New technologies - research centre, University of West Bohemia, Univerzitni 8, 306 14 Plzen,Czech Republic;

New technologies - research centre, University of West Bohemia, Univerzitni 8, 306 14 Plzen,Czech Republic;

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原文格式 PDF
正文语种 eng
中图分类工程光学;
关键词
ZnO; XRD; UV/Vis spectrophotometry; refractive index;

机译：氧化锌; XRD;紫外可见分光光度法折光率;

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Influence of deposition conditions of ZnO thin films on their photonic properties

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