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首页> 外文会议>Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE >Wafer-scale growth of silicon microwire arrays for photovoltaics
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Wafer-scale growth of silicon microwire arrays for photovoltaics

机译：用于光伏的硅微线阵列的晶圆级生长

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摘要

Silicon microwire arrays have recently demonstrated their potential for low cost, high efficiency photovoltaics. These high aspect ratio, radial junction wire arrays allow for the absorption of nearly all the incident sunlight while enabling efficient carrier extraction in the radial direction. One of the remaining challenges to make this technology commercially viable is scaling up of the microwire array growth. We discuss here a technique we have developed for vapor liquid solid growth of microwire arrays over full six-inch wafers using a cold-wall RF-heated chemical vapor deposition furnace. This geometry allows for fairly uniform growth over large areas, rapid cycle time, and improved run-to-run reproducibility. We have studied these large-area microwire arrays using scanning electron microscopy and confocal microscopy to assess their structural fidelity and uniformity. We have also developed a technique to embed these large-area arrays in polymer and peel them off the substrate, which could enable lightweight, flexible solar cells with efficiencies as high as crystalline Si solar cells. We have tested the energy conversion properties of these microwire array samples grown using a liquid junction contact and a photoelectrochemical cell. Initial efficiencies measured in this way suggest that the material quality of these microwire arrays is similar to earlier small-area wire arrays that we have grown, meaning that this technique is a viable way to scale up microwire array devices.
机译：硅微线阵列最近证明了其在低成本，高效率光伏电池中的潜力。这些高深宽比的径向结线阵列可吸收几乎所有入射的阳光，同时能够在径向方向上高效地提取载流子。使该技术在商业上可行的剩余挑战之一是扩大微线阵列的增长。我们在这里讨论我们开发的一种技术，该技术使用冷壁RF加热化学气相沉积炉在整个六英寸晶圆上微线阵列的汽液相固生长。这种几何形状允许在大面积上实现相当均匀的增长，快速的循环时间并提高了批次间的可重复性。我们已经使用扫描电子显微镜和共聚焦显微镜研究了这些大面积微线阵列，以评估其结构保真度和均匀性。我们还开发了一种技术，可以将这些大面积阵列嵌入聚合物中，并将其从基板上剥离下来，从而可以实现轻质，柔性的太阳能电池，其效率与晶体硅太阳能电池一样高。我们已经测试了使用液接点接触和光电化学电池生长的这些微线阵列样品的能量转换特性。以这种方式测量的初始效率表明，这些微线阵列的材料质量与我们已经发展的较早的小面积线阵列相似，这意味着该技术是放大微线阵列设备的可行方法。

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