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High Performance Cu-doped SiO_2 ReRAM by a Novel Chemical Soak Method

机译:新型化学浸泡法制备高性能Cu掺杂SiO_2ReRAM

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摘要

In this paper, a novel chemical soak method is proposed to fabricate a Cu-doped SiO_2 ReRAM device. This method can easily fabricate a lightly Cu-doped SiO_2 film and effectively improve the reliability of the conventional Cu-doped SiO_2 ReRAM device. A reproducible bipolar switching characteristic with set/reset voltage (ca. 2.5 V/ -0.7 V) is performed in this device and the electrical conduction in HRS and LRS are related to Poole-Frenkel and Ohmic conduction, respectively. Excellent performance in terms of high on/off ratio (~10~6), narrow range distribution of set and reset voltages, stable data retention, and up to 110 times switching cycles has been achieved by this novel chemical soak method for Cu-doped SiO_2 ReRAM device.
机译:本文提出了一种新型的化学浸泡法来制备掺杂Cu的SiO_2ReRAM器件。该方法可以容易地制造轻掺杂Cu的SiO_2膜,并有效地提高了常规掺杂Cu的SiO_2ReRAM器件的可靠性。在该器件中执行了具有设置/复位电压(约2.5 V / -0.7 V)的可重现双极开关特性,并且HRS和LRS中的导电分别与Poole-Frenkel和Ohmic导电有关。通过这种新颖的化学掺杂铜掺杂方法,在高通/断比(〜10〜6),设置和复位电压的窄范围分布,稳定的数据保持以及高达110倍的开关周期方面具有出色的性能。 SiO_2 ReRAM器件。

著录项

  • 来源
  • 会议地点 Boston MA(US);Boston MA(US)
  • 作者单位

    Department of Electronic Engineering Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.,Program in Electrical and Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.;

    Department of Electronic Engineering Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.;

    Department of Electrophysics, National Chiao Tung University, Hsinchu, Taiwan R.O.C.;

    Department of Electronic Engineering Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.,Program in Electrical and Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.;

    Department of Electronic Engineering Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.,Program in Electrical and Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.;

    Department of Electronic Engineering Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.,Program in Electrical and Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.;

    Department of Electronic Engineering Communications Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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