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首页> 外文会议>Physics and technology of high-k materials 9 >Characterization of the Solid State Properties of Anodic Oxides on Ta-Nb Alloys as a Function of the Anodizing Conditions
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Characterization of the Solid State Properties of Anodic Oxides on Ta-Nb Alloys as a Function of the Anodizing Conditions

机译：Ta-Nb合金上阳极氧化物的固态特性与阳极氧化条件的关系

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摘要

Tantalum oxide, niobium oxide and Ta-Nb containing mixed oxides were grown by anodizing sputter-deposited Ta_xNb_(1-x) alloys with 0 ≤x ≤1. A photoelectrochemical investigation was performed in order to estimate the band gap values of the oxides as a function of their composition as well as to estimate their flat band potential. Differential capacitance, C, curves were recorded for all the investigated oxides in a wide range of electrode potential and for several frequencies of the alternative signal. The dependence of C on the applied potential and ax. frequency was interpreted on the basis of amorphous semiconductor Schottky barrier, and allowed to estimate the dielectric constant of the investigated oxides.
机译：通过对0≤x≤1的溅射沉积Ta_xNb_（1-x）合金进行阳极氧化，可生长出氧化钽，氧化铌和含Ta-Nb的混合氧化物。进行光电化学研究以估计氧化物的带隙值作为其组成的函数以及估计其平带势。记录了在广泛的电极电势范围内以及所有替代信号频率下所有研究的氧化物的差分电容C曲线。 C对施加的电势和轴的依赖性。根据非晶半导体肖特基势垒解释频率，并允许估计所研究氧化物的介电常数。

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  • 来源
  • 会议地点 Boston MA(US);Boston MA(US)
  • 作者

    F. Di Franco; G. Zampardi; M. Santamaria; F. Di Quarto; H. Habazaki;

  • 作者单位

    Electrochemical Materials Science Laboratory, Facolta di Ingegneria,Viale delle Scienze, Universita di Palermo, 90128 Palermo, Italy;

    Electrochemical Materials Science Laboratory, Facolta di Ingegneria,Viale delle Scienze, Universita di Palermo, 90128 Palermo, Italy;

    Electrochemical Materials Science Laboratory, Facolta di Ingegneria,Viale delle Scienze, Universita di Palermo, 90128 Palermo, Italy;

    Electrochemical Materials Science Laboratory, Facolta di Ingegneria,Viale delle Scienze, Universita di Palermo, 90128 Palermo, Italy;

    Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, Japan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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