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In_(0.7)Ga_(0.3)As Tunneling Field-Effect-Transistors with LaAlO_3 and ZrO_2 High-k Dielectrics

机译:LaAlO_3和ZrO_2高介电常数In_(0.7)Ga_(0.3)As隧穿场效应晶体管

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摘要

We investigated the device structure and fabrication process of In_(0.7)Ga_(0.3)AS tunneling field-effect-transistors (TFETs) with atomic-layer-deposited (ALD) high-k dielectrics. We compared the device performance of In_(0.7)Ga_(0.3)As TFETs with p++/i and p+++ tunneling junctions. TFETs with p+++ tunneling junction exhibit higher drive current and lower subthreshold swing than devices with p++/i junction. Device characteristics of InGaAs TFETs with different high-k dielectrics LaA103 and ZrO_2 have also been studied. In_(0.7)Ga_(0.3)As TFETs with ZrO_2 (EOT~0.8 nm) exhibit subthreshold swing of 80mV/dec and drive current of 44 mA/mm (at V_g-V_(th)=2V).
机译:我们研究了具有原子层沉积(ALD)高k电介质的In_(0.7)Ga_(0.3)AS隧穿场效应晶体管(TFET)的器件结构和制造工艺。我们将In_(0.7)Ga_(0.3)As TFET与p ++ / i和p ++ / n +隧穿结的器件性能进行了比较。具有p ++ / n +隧道结的TFET与具有p ++ / i结的器件相比,具有更高的驱动电流和更低的亚阈值摆幅。还研究了具有不同高k电介质LaA103和ZrO_2的InGaAs TFET的器件特性。 ZrO_2(EOT〜0.8 nm)的In_(0.7)Ga_(0.3)As TFET的亚阈值摆幅为80mV / dec,驱动电流为44mA / mm(在V_g-V_(th)= 2V时)。

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  • 会议地点 Boston MA(US);Boston MA(US)
  • 作者单位

    Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Rd, Austin, TX 78758 USA;

    Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Rd, Austin, TX 78758 USA;

    Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Rd, Austin, TX 78758 USA;

    Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Rd, Austin, TX 78758 USA;

    Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Rd, Austin, TX 78758 USA;

    Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Rd, Austin, TX 78758 USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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