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Ultrasonic Linear Motor using Multilayer Piezoelectric Actuators and Experiment of Precision Positioning Control

机译:多层压电致动器的超声波直线电机及精确定位控制实验

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摘要

This paper presents a new type ultrasonic linear motor with multilayer piezoelectric actuators.To find a solution to overcome the small tensile strength of the multilayer piezoelectric actuators,a special construction using wedges has been developed.This kind of motor can move agilely forward and backward.We measured the ultrasonic linear motor's characteristic.Finally,Applying adjusting frequency and phase,and PI controlling strategy,the μm order precision in position was attained.
机译:本文提出了一种新型的带有多层压电致动器的超声波直线电机。为了找到一种解决方案,以克服多层压电致动器的抗拉强度低的问题,开发了一种特殊的楔形结构,这种电机可以灵活地前后移动。最后,通过调整频率和相位,采用PI控制策略,达到了μm级的位置精度。

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