GROWTH OF BIAXIALLY TEXTURED Ba_xPb_(1-x)TiO_3 FERROELECTRIC THIN FILMS ON AMORPHOUS Si_3N_4

机译：非晶Si_3N_4上双轴化Ba_xPb_（1-x）TiO_3铁电薄膜的生长

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We prepared highly-aligned, biaxially textured Ba_xPb_(1-x)TiO_3 (PBT) on amorphous Si_3N_4 by using ion beam-assisted deposited (IBAD) MgO as a template layer. PBT was deposited on biaxially textured MgO using sol-gel synthesis, metallorganic chemical vapor deposition (MOCVD), and molecular beam epitaxy (MBE). The biaxial texture of the PBT was inherited from the MgO template. Reflection high-energy electron diffraction (RHEED) and cross section transmission electron microscopy (TEM) experiments suggest that exposure of the MgO template to atmospheric moisture before PBT heteroepitaxy resulted in a significant narrowing of the PBT in-plane orientation distribution. The microstructures of the biaxially textured PBT films were analyzed by x-ray diffraction (XRD), RHEED, and TEM. Dynamic contact mode electrostatic force microscopy polarization hysteresis loops confirmed that these films are ferroelectric.

机译：我们通过使用离子束辅助沉积（IBAD）MgO作为模板层，在非晶Si_3N_4上制备了高度对齐的双轴织构Ba_xPb_（1-x）TiO_3（PBT）。使用溶胶-凝胶合成，金属有机化学气相沉积（MOCVD）和分子束外延（MBE）将PBT沉积在双轴织构的MgO上。 PBT的双轴织构是从MgO模板继承的。反射高能电子衍射（RHEED）和截面透射电子显微镜（TEM）实验表明，在PBT异质外延之前，MgO模板暴露于大气水分会导致PBT面内取向分布明显变窄。通过X射线衍射（XRD），RHEED和TEM分析了双轴织构PBT膜的微观结构。动态接触模式静电力显微镜极化磁滞回线证实了这些薄膜是铁电的。

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《Proceedings vol.2003-29; Epitaxial Growth of Functional Oxides Symposium and Electrochemical Society Meeting; 20031012-17; Orlando,FL(US)》|2003年|P.167-180|共14页
会议地点 OrlandoFL(US)
作者
Rhett T. Brewer; David A. Boyd; Mohamed Y. El-Naggar; Stacey W. Boland; Young-Bae Park; Sossina M. Haile; David G. Goodwin; Harry A. Atwater;
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California Institute of Technology, Division of Engineering and Applied Science Pasadena, CA 91125;

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1. Growth of biaxially textured Ba_xPb_(1-x)TiO_3 ferroelectric thin films on amorphous Si_3N_4 [J] . Rhett T. Brewer, David A. Boyd, Mohamed Y. El-Naggar, Journal of Applied Physics . 2005,第3期

机译：双轴织构Ba_xPb_（1-x）TiO_3铁电薄膜在非晶Si_3N_4上的生长
2. Characteristics of (La_(1-x)Sr_x)MnO_3 and (La_(1-x)Sr_x)CoO_3 Buffer Materials and their Effect on Ferroelectric Properties of (Pb_(1-x)Sr_x)TiO_3 Thin Films [J] . Cheng H.F., Chou C.C. Ferroelectrics: Letters Section . 2000,第1a4期

机译：（La_（1-x）Sr_x）MnO_3和（La_（1-x）Sr_x）CoO_3缓冲材料的特性及其对（Pb_（1-x）Sr_x）TiO_3薄膜铁电性能的影响
3. CHARACTERISTIC OF (100)-TEXTURED (Pb_xSr_(1-x))TiO_3 THIN FILMS USED FOR DRAM AND TUNABLE DEVICE APPLICATION [J] . YAN-KAI CHIOU, TAI-BOR WU Integrated Ferroelectrics . 2006,第1期

机译：（100）-纹理（Pb_xSr_（1-x））TiO_3薄膜的特点用于DRAM和可调谐器件
4. GROWTH OF BIAXIALLY TEXTURED Ba_xPb_(1-x)TiO_3 FERROELECTRIC THIN FILMS ON AMORPHOUS Si_3K_4 [C] . Rhett T. Brewer, David A. Boyd, Mohamed Y. El-Naggar, Epitaxial Growth of Functional Oxides Symposium . 2005

机译：双轴纹理Ba_xpb_（1-x）TiO_3铁电薄膜在无定形Si_3k_4上的生长
5. Textured ferroelectric thin films: Synthesis, characterization, and influence of compositional grading on the dielectic behavior. [D] . El-Naggar, Mohamed Y. 2007

机译：织构铁电薄膜：合成，表征以及成分分级对介电行为的影响。
6. Ultrathin Ferroelectric Films: Growth Characterization Physics and Applications [O] . Ying Wang, Weijin Chen, Biao Wang, 2014

机译：超薄铁电薄膜：生长表征物理和应用
7. Growth of biaxially textured BaxPb1–xTiO3 ferroelectric thin films on amorphous Si3N4 [O] . Brewer Rhett T., Boyd David A., El-Naggar Mohamed Y., 2005

机译：在非晶态Si3N4上双轴织构BaxPb1-xTiO3铁电薄膜的生长

GROWTH OF BIAXIALLY TEXTURED Ba_xPb_(1-x)TiO_3 FERROELECTRIC THIN FILMS ON AMORPHOUS Si_3N_4

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