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GROWTH AT HIGH RATES OF EPITAXIAL YBCO FILM ASSISTED BY LIQUID PHASE

机译:液相辅助的YBCO薄膜的高速生长

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摘要

High-rate in-situ YBa_2Cu_3O_7 (YBCO) films are grown by means of molecular beam epitaxy with electron beam co-evaporation. Even though our oxygen pressure is low, ~ 5 x 10~(-5) Torr, we can synthesize as-grown superconducting YBCO films at a deposition rate of 10 nm/s, with critical current density (J_c) more than 2 MA/cm~2. Relatively high temperatures of around 900℃ were necessary in this process so far. At this temperature at a given oxygen activity a Ba-Cu-O liquid forms along with the YBCO epitaxy. This liquid seems essential for high J_c YBCO film growth at very high growth rate and may be essential for all high-rate processes. Consideration of the YBCO phase stability in the liquid Ba-Cu-O leads to a possibility of lower temperature growth down to 800℃, and lower still by the addition of oxyfluorides to the liquid, suitable for coated conductor tape synthesis.
机译:通过分子束外延和电子束共蒸发生长高速率原位YBa_2Cu_3O_7(YBCO)薄膜。即使我们的氧气压力很低,约为〜5 x 10〜(-5)Torr,我们也可以以10 nm / s的沉积速率合成生长的超导YBCO薄膜,且临界电流密度(J_c)大于2 MA /厘米〜2。到目前为止,在此过程中必须达到900℃左右的相对较高的温度。在此温度下,在给定的氧活度下,Ba-Cu-O液体与YBCO外延形成。这种液体似乎对于以非常高的增长率高J_c YBCO薄膜生长是必不可少的,并且可能对于所有高速率过程都是必不可少的。考虑液态Ba-Cu-O中YBCO相的稳定性,可能会降低温度至800℃的温度,并通过向液体中添加氟氧化物来降低温度,这适用于涂层导体带的合成。

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