INTEGRATED OPTICAL CHEMICAL SENSOR FABRICATED ON SILICON SUBSTRATE

机译：集成在硅基板上的集成光学化学传感器

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This paper presents the design details of an optical chemical sensor based on a Mach-Zehnder Interferometer (MZI), fabricated with MOS compatible processes and materials. The fabricated waveguides showed a light attenuation around 2 dB/cm for TE0 propagation (632.8nm). Using a simulator software, we showed that the designed optical chemical sensor has a high sensitivity for the effective refractive index changes, around 10E-4, and it allows us to have several possibilities of application of these sensors as: protein absorption in modified surfaces (biotechnology), surface immobilized anti-body action (medicine) and others.

机译：本文介绍了基于Mach-Zehnder干涉仪（MZI）的光学化学传感器的设计细节，该传感器采用MOS兼容的工艺和材料制造。制成的波导对TE0传播（632.8nm）表现出大约2 dB / cm的光衰减。使用模拟器软件，我们证明了所设计的光学化学传感器对有效折射率变化具有很高的灵敏度，大约为10E-4，它使我们能够将这些传感器应用于以下几种应用：生物技术），表面固定的抗体作用（药物）等。

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《Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509;》|2005年|P.380-388|共9页
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作者
Acacio Luiz Siarkowski; Nilton Itiro Morimoto; Mauricio S. Baptista; Ben-Hur Viana Borges;
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作者单位

EPUSP - Escola Politecnica da Universidade de Sao Paulo;

IQUSP - Institute de Quimica da Universidade de Sao Paulo;

EESC - Escola de Engenharia de Sao Carlos Universidade de Sao Paulo;

Av. Prof. Luciano Gualberto, 158, trav. 3, Sao Paulo, SP, 05508-900, Bra;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
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INTEGRATED OPTICAL CHEMICAL SENSOR FABRICATED ON SILICON SUBSTRATE

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