Effects of Slurry Distribution using Diaphragm and Centrifugal pumps on the Defectivity in a Cu CMP Process

机译：隔膜泵和离心泵分配浆料对Cu CMP工艺中缺陷率的影响

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Slurry health has been shown to impact defectivity in the chemical mechanical planarization (CMP) process. Improper mechanical handling is known to form large agglomerates in CMP slurries that can lead to increased scratching of the surface. The foremost cause of slurry damage occurs from shear stresses placed on the slurry particles as they pass through the motive force in a distribution system.

机译：浆液健康状况已显示出会影响化学机械平面化（CMP）过程中的缺陷率。已知机械处理不当会在CMP浆料中形成大块，这会导致表面刮擦的加剧。浆液损坏的最主要原因是当浆液颗粒通过分配系统中的原动力时，施加在浆液颗粒上的剪切应力引起的。

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《Processing, materials, and integration of damascene and 3D interconnects》|2009年|p.47-54|共8页
会议地点 Vienna(AT);Vienna(AT)
作者
R. Donis; M. Fisher; L. Bauck;
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作者单位

Materials Development, Air Liquide, Dallas, Texas 75243, USA;

Materials Development, Air Liquide, Dallas, Texas 75243, USA;

Applications Lab, Levitronix, Gresham, Oregon 97030 USA;

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原文格式 PDF
正文语种 eng
中图分类半导体技术;
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1. Focus on slurry pumping: GIW Industries helps ease your slurry pump selection chores, while EnviroTech Pumpsystems describes the key factors in centrifugal slurry pump design [J] . Reab Berry World Pumps . 1999,第389期

机译：专注于泥浆泵：GIW Industries帮助您减轻泥浆泵的选件琐事，而EnviroTech Pumpsystems描述了离心泥浆泵设计中的关键因素
2. Phase discrimination and a high accuracy algorithm for PIV image processing of particle-fluid two-phase flow inside high-speed rotating centrifugal slurry pump [J] . Shi Baocheng, Wei Jin Jia, Zhang Yan Flow Measurement and Instrumentation . 2015,第Null期

机译：高速旋转离心式渣浆泵内颗粒流两相流的PIV图像处理的相位判别和高精度算法
3. Agglomeration characteristic of particles in alumina slurry by addition of chemicals and milling process for Cu CMP [J] . M.-H. Choi, N.-H. Kim, J.-H. Lim Materials Science and Engineering. B, Solid-State Materials for Advanced Technology . 2005,第1a3期

机译：添加化学药品和研磨工艺对氧化铝浆液中颗粒的团聚特性
4. Effects of Slurry Distribution using Diaphragm and Centrifugal pumps on the Defectivity in a Cu CMP Process [C] . R. Donis, M. Fisher, L. Bauck Symposium on processing, materials, and integration of damascene and 3D interconnects . 2010

机译：泥浆分布利用隔膜和离心泵对Cu CMP工艺缺陷的影响
5. The long-term performance of large centrifugal sand slurry pumps. [D] . Posner, Barry. 1998

机译：大型离心式砂浆泵的长期性能。
6. Effects of Ball Milling Processing Conditions and Alloy Components on the Synthesis of Cu-Nb and Cu-Mo Alloys [O] . Xuekun Shang, Xitao Wang, Silian Chen 2019

机译：球磨工艺条件和合金成分对Cu-Nb和Cu-Mo合金合成的影响
7. Centrifugal Casting of Al-Cr-Cu Alloy Slurry, Structure-Controlled by Two-Step-Stir-Mix-Quenching Process [O] . Tatsuya Ohmi, Hiroshi Jinmon, Masayuki Kudoh 2002

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Effects of Slurry Distribution using Diaphragm and Centrifugal pumps on the Defectivity in a Cu CMP Process

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