Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications

机译：用于微型机器人应用的超细6轴力扭矩传感器的设计和校准

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摘要

This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This is the first microfabricated 6-axis force-torque sensor that has been successfully developed.

机译：这项工作描述了用于监视亚毫牛顿和亚微牛顿计范围内的力的电容式多轴力扭矩传感器的设计。该力范围使其成为微机器人应用的重要工具。该传感器经过实验研究和校准。这是第一个成功开发的微加工六轴力扭矩传感器。

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《IEEE International Conference on Robotics and Automation;ICRA '09》|2009年|520-525|共6页
会议地点 Kobe(JP);Kobe(JP)
作者
Beyeler F.; Muntwyler S.; Nelson B.J.;
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ETH Zurich, Zurich, Switzerland;

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关键词
calibration; force sensors; microfabrication; micromanipulators; torque control; MEMS; capacitive multiaxis force-torque sensor; microfabricated 6-axis force-torque sensor design; micromanipulation; microrobotic application;

机译：校准;力传感器;微制造;微操纵器;转矩控制; MEMS;电容式多轴力转矩传感器;微制造六轴力转矩传感器设计;微操纵;微机器人应用;

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4. Design and Calibration of a Microfabricated 6-Axis Force-Torque Sensor for Microrobotic Applications [C] . F. Beyeler, S. Muntwyler, B. J. Nelson International Conference on Robotics and Automation . 2009

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Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications

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