首页> 外文会议>Saint Petersburg International Conference on Integrated Navigation Systems; 20050523-25; Saint Petersburg(RU) >INERTIAL EFFECTS IN SURFACE AND BULK ELASTIC WAVES AND POSSIBILITY OF THEIR USE IN HIGH-G SOLID-STATE MICRO GYROSCOPES
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INERTIAL EFFECTS IN SURFACE AND BULK ELASTIC WAVES AND POSSIBILITY OF THEIR USE IN HIGH-G SOLID-STATE MICRO GYROSCOPES

机译:表面和体弹性波的惯性效应及其在高G固态微陀螺中使用的可能性

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摘要

The development of miniature and inexpensive solid-state inertial instruments for different applications implicates an urgent and complex group of problems. Besides the level of initial investment, many factors have to be analyzed for various devices in their operating principles. They include requirements on primary cost and expected scale of production, and an effective categorization of instruments with different performance specifications. For application to highly maneuverable objects of a mid-scale production, it has drawn a definite interest to use microelectromechanical gyroscopic sensors (MEMS) utilizing the surface and bulk acoustic waves (SAW and BAW) in piezoelectric crystals. The fundamental inertial effects of rotation on the phase velocity and polarization parameters of elastic waves in solids have been considered earlier. Under the restriction of modern planar technology, the core elements of structures and signal processing for design of solid-state gyroscopes using these effects are described in the present report. To validate correctness of the theory developed in this paper, the experimental and numerical results are given on a new rate sensor fabricated with a thermostable cut of single-crystalline quartz, using technique of interdigital transducers (IDT's). A set of different resonator schemes by Kurosawa, Varadan, et al, who claimed the inertial grade of several deg/h, has been analyzed also. An original joint STM-KIST's variant of an advanced SAW-sensor has been proposed.
机译:用于不同应用的微型且廉价的固态惯性仪器的开发牵涉到一系列紧迫而复杂的问题。除了初始投资水平外,还必须针对各种设备的工作原理分析许多因素。其中包括对基本成本和预期生产规模的要求,以及对具有不同性能规格的仪器的有效分类。为了应用于中等规模生产的高机动性对象,使用压电晶体中的表面和体声波(SAW和BAW)的微机电陀螺仪传感器(MEMS)引起了人们的极大兴趣。旋转对固体中弹性波的相速度和极化参数的基本惯性影响已在较早之前考虑过。在现代平面技术的限制下,本报告介绍了利用这些效应设计固态陀螺仪的结构和信号处理的核心要素。为了验证本文开发的理论的正确性,使用指间换能器(IDT's)技术,在使用单晶石英的热稳定切口制造的新型速率传感器上给出了实验和数值结果。 Kurosawa,Varadan等人的一组不同的谐振器方案也进行了分析,他们声称惯性等级为几度/小时。已经提出了先进的SAW传感器的原始STM-KIST联合变体。

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