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首页> 外文会议>Saint Petersburg International Conference on Integrated Navigation Systems; 20050523-25; Saint Petersburg(RU) >BALANCING 'SI-FLEX' ACCELEROMETER DESIGNED FOR MEASURING HIGH ACCELERATIONS
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BALANCING 'SI-FLEX' ACCELEROMETER DESIGNED FOR MEASURING HIGH ACCELERATIONS

机译：专为测量高精密度而设计的平衡式“ SI-FLEX”加速度计

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摘要

The features of operation of gas-filled accelerometers of navigation class with the elastic suspension of the pendulum made of monocrystalline silicon are considered in the paper. It is shown that existence of non-coincidence between center of mass of the accelerometer pendulum and application point of the force produced by balancing force generator causes angular and translational displacements of the pendulum plate which values are comparable with the gap size of accelerometer gas damper and they are not compensated by accelerometer feedback system. As a result of this fact the accelerometer can lose its functionability at large accelerations. The fabrication and construction reasons of occurring indicated non-coincidence are analyzed. The pendulum suspension is suggested to be implemented by means of cross-shaped flexures made of monocrystalline silicon having high radial flexural stiffness to eliminate accelerometer functionability loss at high accelerations. The possible manufacturing of the pendulum with cross-shaped flexures made of monocrystalline silicon by a method of anisotropic etching was shown. Experimental results and figures of silicon pendulum with cross-shaped flexures are given in the paper as illustrations.
机译：本文考虑了具有单晶硅摆锤的弹性悬架的导航类充气式加速度计的工作特性。结果表明，加速度计摆锤的质心与平衡力发生器产生的力的施加点之间不重合会导致摆锤板的角位移和平移，其值可与加速度计气体阻尼器和它们没有由加速度计反馈系统补偿。因此，加速度计在大加速度下可能会失去其功能。分析了发生指示不一致的制造和构造原因。建议摆悬架通过具有高径向挠曲刚度的单晶硅制成的十字形挠曲件来实现，以消除加速器在高加速度下的功能损失。示出了通过各向异性蚀刻的方法可以制造由单晶硅制成的具有十字形弯曲的摆的可能性。本文给出了具有十字形弯曲的硅摆的实验结果和图形。

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