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首页> 外文会议>Saint Petersburg International Conference on Integrated Navigation Systems; 20070528-30; Saint Petersburg(RU) >MEMS FOR AEROSPACE NAVIGATION
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MEMS FOR AEROSPACE NAVIGATION

机译：航空航天微机电系统

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摘要

The MEMS aerospace market has its own specificities in terms of market size, standards, and performance characteristics (very long term stability, reliability and safety levels). Improvements are needed for future applications. THALES Avionics has a twenty year experience in quartz and silicon MEMS design and manufacturing and is recognized as a leader by the French MOD in this field. MEMS pressure sensors and accelerometers are manufactured in large volume and used for safety critical applications. THALES technology policy focused on planar architecture, die vacuum packaging and DRIE Deep Reactive Ion Etching allowing good characteristics for sensors in development. A Silicon Vibrating Beam Accelerometer single chip is now under development. Its operating principle is described with two resonators in push-pull configuration. A tuning fork planar rate gyro is also developed with exactly the same technology for industrial efficiency. Performance results will be addressed. The development and industrialization road-map of theses inertial products is described for the following five years. Gyro-compassing grade inertial sensors would be available during the next decade allowing low cost high grade navigators using simultaneously GNSS receivers and inertial MEMS navigators.
机译：MEMS航空航天市场在市场规模，标准和性能特征（非常长期的稳定性，可靠性和安全性水平）方面具有其自身的特殊性。未来的应用需要改进。 THALES Avionics在石英和硅MEMS设计和制造方面拥有20年的经验，并被法国MOD认可为该领域的领导者。 MEMS压力传感器和加速度计大批量生产，并用于安全关键型应用。 THALES的技术政策侧重于平面架构，芯片真空包装和DRIE深度反应离子蚀刻，为开发中的传感器提供了良好的特性。硅振动梁加速度计单芯片现在正在开发中。用两个推挽式谐振器描述了其工作原理。还采用完全相同的技术开发了音叉平面速度陀螺仪，以提高工业效率。性能结果将得到解决。这些惯性产品的发展和产业化路线图描述了接下来的五年。未来十年，陀螺仪兼容的惯性传感器将面市，允许同时使用GNSS接收器和惯性MEMS导航仪的低成本高级导航仪。

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