Electro-thermal simulation of micromachined power sensors at dc and microwave frequencies

机译：直流和微波频率下微机械功率传感器的电热模拟

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In this paper a theoretical simulation model for characterization of the electrical and thermal behavior of micromachined power sensors at both the dc and high frequencies (microwave and millimeter waves) is developed. The sensor fabrication techniques is based on bulk and surface micromachining of AlGaAs/gaAs heterostructures. The simulation is based on the solution of the coupled electromagnetic field and heat transfer equations, using hybrid finite-element/finite-difference techniques. The model can be used as an effective tool for adjustment of design parameters, such as geometric configuration of the sensor resistive element, and arrangement of thermocouples around the resistor for optimum sensitivity and noise figure. Simulated results were compared with experimental measurements with good agreement.

机译：在本文中，建立了用于表征微机械功率传感器在直流和高频（微波和毫米波）下的电和热行为的理论仿真模型。传感器制造技术基于AlGaAs / gaAs异质结构的整体和表面微加工。该模拟基于耦合的电磁场和热传递方程的解，采用混合有限元/有限差分技术。该模型可用作调整设计参数的有效工具，例如传感器电阻元件的几何配置以及电阻器周围的热电偶布置，以实现最佳灵敏度和噪声系数。模拟结果与实验测量结果相吻合。

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来源
《Seventh International Symposium on Mechatronics and its Applications (ISMA' 10)》|2010年|P.1-6|共6页
会议地点 Sharjah(AE);Sharjah(AE)
作者
Ali Idris Ahmed; Kabula Muamba; Hartnagel Hans L.;
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作者单位

Al-Ghurair University, College of Engineering and Applied Sciences, P. O. Box 37374, Dubai, UAE;

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原文格式 PDF
正文语种 eng
中图分类 TH15;
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2. Optimization of Indirectly-Heated Type Microwave Power Sensors Based on GaAs Micromachining [J] . De Bo Wang Sensors Journal, IEEE . 2012,第5期

机译：基于GaAs微加工的间接加热式微波功率传感器的优化
3. A micromachined inline type microwave power sensor with working state transfer switches [J] . Han Lei Journal of Semiconductors . 2011,第5期

机译：具有工作状态转换开关的微机械在线型微波功率传感器
4. Electro-thermal simulation of micromachined power sensors at dc and microwave frequencies [C] . Ali Idris Ahmed, Kabula Muamba, Hartnagel Hans L. International Symposium on Mechatronics and its Applications . 2010

机译：DC和微波频率下微机械电源传感器的电热模拟
5. Micromachined broadband thermocouple microwave power sensors in CMOS technology. [D] . Milanovic, Veljko. 1999

机译：CMOS技术的微加工宽带热电偶微波功率传感器。
6. Behavioral Modeling of DC/DC Converters in Self-Powered Sensor Systems with Modelica [O] . Jan Kokert, Leonhard M. Reindl, Stefan J. Rupitsch 2021

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7. Results are presented for the first fully physical, time-dependent, coupled electro-thermal simulations of microwave power FETs and MMICs, on timescales suitable for CAD. This is achieved by combining an original, analytical thermal resis-tance matrix model of time-dependent heat flow in a power FET or MMIC, with a fully physical electrical CAD model for transistors. [O] . David S., Batty W., Panks A.J., 2000

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8. Improvement of Frequency Response of Waveguide-Diaphragm-Type Resistive Sensors for High Power Microwave Pulse Measurement [R] . Kancleris, Z. 2005

机译：用于高功率微波脉冲测量的波导 - 膜片式电阻传感器频率响应的改进

Electro-thermal simulation of micromachined power sensors at dc and microwave frequencies

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