• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Solid-state sensor and actuator workshop : Technical digest >ON-CHIP EDDY CURRENT SENSOR FOR CRACK DETECTION IN METALS
【24h】

ON-CHIP EDDY CURRENT SENSOR FOR CRACK DETECTION IN METALS

机译：用于金属裂纹检测的片上涡流传感器

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this paper, we present a new integrated eddy current sensorrnfor the detection of microcracks on the surface of metals. Therndevice consists of two stacked planar coils fabricated onto a glassrnsubstrate and encapsulated on one side by a Ni/Fe permalloyrnmagnetic core. Fabrication of the device is achieved by a UVLIGArnthick photoresist lithography process which involves thernlithographic patterning of 15-25 pm thick molds using AZ-4000rnseries photoresist. The introduction of the permalloy core coupledrnwith the thick conductor lines produces a high inductance, lowrnresistance device capable of generating large magnetic fields atrnlow driving currents. Aluminum and titanium testing standardsrncontaining cracks 7 mils wide and 8 to 40 mils deep have beenrnused to confirm the excellent operation of this new sensor. Therndevice has been tested in the frequency range of 10 kHz - 500 kHzrnand has been shown to be capable of clearly detecting cracks withrndepths of as little as S mils (200 pm) at a low input power of 30rnmW. Results show an extremely linear relation between crackrndepth and output signal voltage with a reasonably high level ofrnunamplified signal strength.
机译：在本文中，我们提出了一种新型的集成涡流传感器，用于检测金属表面的微裂纹。该设备由两个堆叠的平面线圈组成，这些线圈制造在玻璃基板上，并在一侧被Ni / Fe坡莫合金磁芯封装。通过UVLIGA厚的光刻胶光刻工艺来完成器件的制造，该工艺包括使用AZ-4000系列光刻胶对厚度为15-25 pm的模具进行光刻构图。坡莫合金芯与粗导线耦合的引入产生了一种高电感，低电阻的器件，该器件能够在低驱动电流下产生大磁场。铝和钛的测试标准包含了7密耳宽和8到40密耳深的裂缝，以确认这种新型传感器的出色性能。该设备已在10 kHz-500 kHzrn的频率范围内进行了测试，并已被证明能够在30rnmW的低输入功率下清晰地检测出深度仅为S mils（200 pm）的裂纹。结果表明，裂纹深度与输出信号电压之间具有极高的线性关系，并且具有相当高的未放大信号强度水平。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号