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Study on effect of proton irradiation energy in AlGaN/GaN metal-oxide semiconductor high electron mobility transistors

机译:质子辐照能量在AlGaN / GaN金属氧化物半导体高电子迁移率晶体管中的作用研究

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摘要

The effects of proton irradiation energy on Al_2O_3/AlGaN/GaN metal oxide semiconductor high electron mobility transistors (MOSHEMT) were studied. MOSHEMTs were irradiated at different irradiation energies of 5 MeV, 10 MeV, or 15 MeV with a fixed proton dose of 5 × 10~(15) cm~(-2). After the 5 MeV, 10 MeV and 15 MeV proton irradiation, MOSHEMTs' saturation current at gate voltage of 1V were reduced by 95.3, 68.3 and 59.8% and maximum transconductance were reduced by 88, 54.4, and 40.7% respectively. The carrier removal rate of the irradiation energy employed in this study was in the range of 127-289 cm~(-1) having lower energy with the highest removal rate.
机译:研究了质子辐照能量对Al_2O_3 / AlGaN / GaN金属氧化物半导体高电子迁移率晶体管(MOSHEMT)的影响。以5 MeV,10 MeV或15 MeV的不同照射能量以5×10〜(15)cm〜(-2)的固定质子剂量照射MOSHEMT。在5 MeV,10 MeV和15 MeV质子辐照后,MOSHEMT在1V栅极电压下的饱和电流分别降低了95.3、68.3和59.8%,最大跨导分别降低了88、54.4和40.7%。本研究采用的辐照能量的载流子去除率在127-289 cm〜(-1)范围内,能量较低,去除率最高。

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  • 会议地点 Phoenix AZ(US)
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    Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Material Science and Engineering, University of Florida, Gainesville, Florida 32611;

    Department of Chemical and Biological Engineering, Korea University, Seoul 136-713, Korea;

    Department of Chemical and Biological Engineering, Korea University, Seoul 136-713, Korea;

    Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830;

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