Amorphous diamond-like carbon films prepared by dc saddle-field glow-discharge method: doping with boron and phosphorus

机译：直流鞍场辉光放电方法制备的非晶类金刚石碳膜：掺硼和磷

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Our preliminary results show that controllable doping of amorphous hydrogenated DLC films prepared by DC saddle-field glow-discharge technique is possible. We have found deposition conditions when the doping with boron is electrically effective.

机译：我们的初步结果表明，通过DC鞍场辉光放电技术制备的非晶氢化DLC薄膜可控掺杂。我们发现当硼掺杂在电学上有效时的沉积条件。

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《Symposium on Covalently Bonded Disordered Thin-Film Materials held December 2-4, 1997, Boston, Massachusetts, U.S.A.》|1997年|p.165-170|共6页
会议地点 Boston MA(US)
作者
W. Chan; T. Allen; F. Gaspari; J. Szurmak; E. Sagnes; S. Zukotynski;
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正文语种 eng
中图分类物理学;
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Amorphous diamond-like carbon films prepared by dc saddle-field glow-discharge method: doping with boron and phosphorus

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