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首页> 外文会议>Symposium GYRO Technology; 20030916-20030917; Stuttgart; DE >The Micromechanical Coriolis Rate Sensor μCORS II
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The Micromechanical Coriolis Rate Sensor μCORS II

机译：微机械科里奥利速率传感器μCORSII

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摘要

LITEF presented the development of the micromachined gyroscope μCORS I at the Symposium Gyro Technology 2001. While μCORS I was designed for an accuracy of 50 °/h, the target accuracy of μCORS II is 5 °/h and better. Thus it complements LITEF's high-precision fiber optic gyro family. Deep Reactive Ion Etching (DRIE) is used as the key technology for the fabrication of the all silicon gyroscope. Electrode gaps of 2.5 μm and a device layer thickness of 50 μm have been realized. First measurements with control loops implemented on a PC as well as on a breadboard electronics have been performed. Over a period of 7 h (at lab conditions with approx. +-1 K temperature variations) a bias error (1 σ) of 5.4 °/h is obtained. Noise measurements yield values of (0.2 - 0.3) °/sqrt(h). Throughout this paper we present the design of the sensitive element, the concept of the sensor system and the results of sensor and sensor system modeling. We further discuss the micromechanical fabrication process and test results gained from the realized prototypes.
机译：LITEF在Symposium Gyro Technology 2001上介绍了微机械陀螺仪μCORSI的开发。μCORSI的设计精度为50°/ h，而μCORSII的目标精度为5°/ h或更高。因此，它是LITEF的高精度光纤陀螺仪系列的补充。深度反应离子蚀刻（DRIE）被用作制造全硅陀螺仪的关键技术。电极间隙为2.5μm，器件层厚度为50μm。已经在PC以及面包板上的电子设备上执行了带有控制回路的首次测量。在7小时内（在实验室条件下，温度变化约为+ -1 K），获得的偏差误差（1σ）为5.4°/ h。噪声测量得出的值为（0.2-0.3）°/ sqrt（h）。在整个本文中，我们介绍了敏感元件的设计，传感器系统的概念以及传感器和传感器系统建模的结果。我们将进一步讨论微机械制造过程以及从已实现的原型获得的测试结果。

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