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Study of GaSb junction devices by cathodoluminescence and s canning tunneling spectroscopy

机译:GaSb结器件的阴极发光和罐装隧道光谱研究

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摘要

GaSb p-n junctions formed by Zn diffusion in Te-doped n-GaSb single crystalline wafers have been characterized by cathodoluminesence (CL) microscopy and by canning tunneling spectroscopy. CL plane-view observations of the Zn diffused side enable to study the homogeneity of the diffusion treatment. Spectra recorded by current imaging tunneling spectroscopy (CITS) in the n and p sides of the junction, clearly show the respective conductive behaviour and provide information on the local surface band gaps. Results are related to the diffusion profile measured by secondary ion mass spectrometry (SIMS).
机译:在掺Te的n-GaSb单晶晶片中由Zn扩散形成的GaSb p-n结已通过阴极发光(CL)显微镜和罐装隧道光谱法表征。锌扩散侧的CL平面观察能够研究扩散处理的均匀性。通过电流成像隧穿光谱(CITS)在结的n和p侧记录的光谱清楚地显示了各自的导电行为,并提供了有关局部表面带隙的信息。结果与通过二次离子质谱(SIMS)测量的扩散曲线有关。

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