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首页> 外文会议>Symposium on Optical Microstructural Characterization of Semiconductors held November 29-30, 1999, Boston, Massachusetts, U.S.A. >Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry
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Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry

机译：可变角度光谱椭圆光度法测定氟碳聚合物薄膜的光学性能

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Optical properties of vapor phase (VP) deposited and spin-coated fluorocarbon (FC) thin films on silicon substrates, such as refractive index, extinction coefficient and film thickness were characterized by a variable angle spectroscopic ellipsometry (VASE) in the range of 300-800 nm. A Lorentz model allows us to simulate the optical constants of the FC films with a minimum number of parameters while maintaining Kramers-Kronig (KK) consistency between the real and imaginary parts of the optical constants. FC films are nearly transparent over the visible spectrum, so it is possible to assume k (extinction coefficient) chemical bounds 0 over part of the visible spectrum in a Cauchy model. To accurately simulate the obtained ellipsometric spectra, we performed a regression analysis in two steps assuming a three-phase and a four-phase model. The regression analysis was performed using the three-phase model and a best-fit mean-squared error (MSE) value of 1.717 (VP deposited FC film, Lorentz model) was obtained. However, the four-phase model was used to improve the best-fit result of 0.531 (VP deposited FC film, Lorentz model). The surface roughness layer was assumed to be a mixture of FC films and voids under the Bruggeman effective medium approximation (EMA). We found that the best-fit MSE was reduced when surface roughness was included.
机译：用可变角度分光椭圆偏振光度法（VASE）表征硅衬底上气相（VP）沉积和旋涂的碳氟化合物（FC）薄膜的光学特性，例如折射率，消光系数和膜厚，其范围为300- 800纳米Lorentz模型使我们能够以最少的参数来模拟FC薄膜的光学常数，同时保持光学常数的实部和虚部之间的Kramers-Kronig（KK）一致性。 FC膜在可见光谱上几乎是透明的，因此可以在柯西模型中假设k（消光系数）化学键在部分可见光谱上为0。为了准确地模拟获得的椭偏光谱，我们分两步进行了假设为三相和四相模型的回归分析。使用三相模型进行回归分析，得出最佳拟合均方误差（MSE）值为1.717（VP沉积FC薄膜，Lorentz模型）。但是，使用四阶段模型来提高0.531的最佳拟合结果（VP沉积FC膜，Lorentz模型）。在布鲁格曼有效介质近似（EMA）下，假定表面粗糙度层是FC膜和空隙的混合物。我们发现，当包括表面粗糙度时，最佳拟合的MSE降低了。

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