SPECTROSCOPIC STUDY OF RARE EARTH DOPED NANO-CRYSTALLINE SILICON IN SiO_22 FILMS

机译：SiO_22薄膜中稀土掺杂纳米晶硅的光谱学研究

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Si-rich SiO_2, Nd-doped Si-rich SiO_2 and Nd-doped SiO_2 thin films were prepared. Photoluminescence (PL) spectra for visible and infrared were obtained for each as-deposited film. The samples were annealed by steps to different temperatures within the range 600℃-1100℃ for 30 minutes at each annealing temperature. PL spectra were obtained at each step and their characteristics were studied. The best annealing temperature for the PL of the rare earth (RE) ions was obtained. The PL spectra of the films were compared with one another. Energy transfer from the silicon nanocrystals (Si nc) to the RE ions is verified using excitation wavelength and excitation power spectra.

机译：制备了富硅SiO_2，掺Nd的富硅SiO_2和掺Nd的SiO_2薄膜。对于每个沉积膜，获得可见光和红外光的光致发光（PL）光谱。在每个退火温度下，将样品分步退火至600℃-1100℃范围内的不同温度30分钟。在每个步骤获得PL光谱，并研究其特性。获得了稀土（RE）离子PL的最佳退火温度。将膜的PL光谱相互比较。使用激发波长和激发功率谱验证了从硅纳米晶体（Si nc）到RE离子的能量转移。

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《Symposium on Quantum Confined Semiconductor Nanostructures Dec 2-5, 2002 Boston, Massachusetts, U.S.A.》|2002年|p.517-522|共6页
会议地点 Boston MA(US);Boston MA(US)
作者
C. ROZO; L. F. FONSECA; O. RESTO; S. Z. WEISZ;
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作者单位

Physics Department, University of Puerto Rico at Rio Piedras, San Juan, PR, USA;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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1. Effect of rare earth ions-doping on the chemical and optical features of nano-crystalline (Er, Tb :) Si thin films [J] . Park MB, Han KH, Shim JH, Applied Surface Science . 2004,第1a4期

机译：稀土离子掺杂对纳米晶（Er，Tb :) Si薄膜化学和光学特性的影响
2. Relationship between structure and optical properties in rare earth-doped hafnium and silicon oxides: Modeling and spectroscopic measurements [J] . Monteil A, El-Jouad M, Alombert-Goget G, Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2008,第42a44期

机译：稀土掺杂ha和氧化硅中结构与光学性质之间的关系：建模和光谱测量
3. Investigation of Electrical Properties of MOS Structures with Silicon Nitride Films Doped with Rare Earth Elements [J] . A. A. Kovalevsky, A. S. Strogova, N. S. Strogova, Russian Microelectronics . 2014,第4期

机译：稀土元素掺杂氮化硅薄膜MOS结构的电学研究
4. SPECTROSCOPIC STUDY OF RARE EARTH DOPED NANO-CRYSTALLINE SILICON IN SiO_22 FILMS [C] . C. ROZO, L. F. FONSECA, O. RESTO, MRS Meeting . 2003

机译：稀土掺杂纳米晶体硅的光谱研究SiO_22膜
5. Fabrication and characterization of rare earth-doped silicon nanocrystals and rare earth-doped silicon dioxide nanostructures [D] . St. John, John Vincent 1998

机译：稀土掺杂硅纳米晶和稀土掺杂二氧化硅纳米结构的制备与表征
6. The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities [O] . Dan Shan, Mingqing Qian, Yang Ji, 2016

机译：P和B掺杂在具有高电导率的纳米晶硅薄膜中的电子传输行为的变化
7. Excess Modes and Enhanced Scattering in Rare-Earth Doped Amorphous Silicon Thin Films [O] . Zink, B. L., Islam, R., Smith, David J., 2006

机译：稀土掺杂非晶合金中的过量模式和增强散射硅薄膜
8. Minute Doping with Deleterious Rare Earths in YBa2Cu3O7-delta Films for Flux Pinning Enhancements (Postprint). [R] . B. C. Harrison C. V. Varanasi J. W. Kell P. N. Barnes T. J. Haugan 2012

机译：在YBa2Cu3O7-delta薄膜中使用有害稀土进行微小掺杂以进行助焊剂钉扎增强（后印刷）。

SPECTROSCOPIC STUDY OF RARE EARTH DOPED NANO-CRYSTALLINE SILICON IN SiO_22 FILMS

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