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首页> 外文会议>Symposium on In Situ Process Diagnostics and Intelligent Materials Processing held December 2-5, 1997, Boston, Massachusetts, U.S.A. >Rheed studies of a-axis oriented DyBa_2Cu_3O_7 films grown by all-mbe
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Rheed studies of a-axis oriented DyBa_2Cu_3O_7 films grown by all-mbe

机译：全mbe生长的a轴取向DyBa_2Cu_3O_7膜的Rheed研究

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摘要

Real-time, in-situ surface monitoring by reflection high-energy electron diffraction (RHEED) has been the key enabling ocmponent of atomic-layer-by-layer molecular beam epitaxy (ALL-MBE) of complex oxides. RHEED patterns contain information on crystallographic arrangements and long range order on the surface, this can be made quantitative with help of numerical simulations. The dynamics of RHEED patterns and intensities reveal a variety of phenomena such as nucleation and dissolution of secondary-phase precipitates, switching between growth modes (layer-by-layer, step-flow), surface phase transitions (surface reconstruction, roughening, and even phase transitions induced by the electron beam itself), etc. Some of these phenomena are illustrated here, using as a case study our recent growth of atomically smooth a-axis oriented DyBa_2Cu_3O_7 films.
机译：通过反射高能电子衍射（RHEED）进行的实时，原位表面监测已成为实现复杂氧化物原子逐层分子束外延（ALL-MBE）的关键。 RHEED图案包含有关晶体排列和表面上远距离有序的信息，可以通过数值模拟将其定量化。 RHEED模式和强度的动力学揭示了多种现象，例如次级相沉淀物的形核和溶解，生长模式之间的切换（逐层，逐步流动），表面相变（表面重建，粗糙化，甚至由电子束本身引起的相变等）。这里以我们最近在原子上光滑生长的a轴取向DyBa_2Cu_3O_7薄膜的生长为例说明了其中的一些现象。

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