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首页> 外文会议>Symposium F: Third International Conference on Laser Ablation (Cola'95) of the 1995 E-Mrs Spring Conference May 22-26, 1995 Strasbourg, France >Excimer laser ablating preparation of Ba_2NaNb_5O_15 thin films on KTiOPO_4 substrate and its guide wave property
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Excimer laser ablating preparation of Ba_2NaNb_5O_15 thin films on KTiOPO_4 substrate and its guide wave property

机译：KTiOPO_4衬底上准分子激光烧蚀Ba_2NaNb_5O_15薄膜的制备及其波导特性

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摘要

Highly (100)-, (001)- and (100)-oriented Ba_2NaNb_5O_(15) thin films were successfully prepared on (100)-, (010)- and (001)-oriented KTiOPO_4 plates, respectively, by excimer laser ablation technique. The crystallinity and quality of the as-prepared thin films were very well by checking with the X-ray theta-2theta scan and pole-figure analysis, scanning electron microscopy and X-ray photoelectron spectrometry. The m-line spectroscopy was used to evaluate the guide wave property of the as-prepared films. Favorable waveguiding properties were demonstrated by the measurements of propagation loss lower than 1.0 dB/cm for all waveguide modes. The 'non-critical' matching in the guide wave mode can be achieved in the present systems.
机译：通过受激准分子激光烧蚀分别在（100），（010）和（001）取向的KTiOPO_4板上成功制备了高度（100），（001）和（100）取向的Ba_2NaNb_5O_（15）薄膜技术。通过X射线theta-2θ扫描和极图分析，扫描电子显微镜和X射线光电子能谱检查，所制备薄膜的结晶度和质量非常好。 m-线光谱法用于评估所制备的膜的导波性质。通过测量所有波导模式的传播损耗均低于1.0 dB / cm，证明了良好的波导性能。可以在本系统中实现导波模式下的“非关键”匹配。

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