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Efficient simulations of 6σ VT distributions due to Random Discrete Dopants

机译:随机离散掺杂引起的6σV T 分布的高效仿真

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Previously published 3D simulations of 105 statistical samples have shown distinct asymmetry in Random Discrete Dopant induced threshold voltage variations in Bulk MOSFETs. Based on detailed statistical analysis of the underlying physical processes that shape such distributions we present a robust method, capable of accurately predicting random discrete dopant induced threshold voltage variation out to 6–7σ from the mean. This methodology can be used to dramatically reduce the computational cost associated with accurately determining the effect of Random Dopant distribution on threshold voltage in bulk MOSFETs.
机译:先前发布的10 5 统计样本的3D仿真显示,在散装MOSFET中,随机离散掺杂引起的阈值电压变化具有明显的不对称性。基于对影响此类分布的潜在物理过程的详细统计分析,我们提出了一种可靠的方法,该方法能够准确地预测随机离散掺杂剂引起的阈值电压从均值变化到6-7σ。这种方法可用于大大降低与准确确定随机掺杂分布对大MOSFET阈值电压的影响有关的计算成本。

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