Surface acoustic wave devices

机译：声表面波装置

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Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g. LiNbO_3 and ZnO) will be reviewed. Then the application of surface acoustic waves in electronic devices will be presented. Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.

机译：从介绍表面声波开始，将回顾它们在压电材料（例如LiNbO_3和ZnO）上使用叉指换能器（IDT）的产生和检测。然后将介绍表面声波在电子设备中的应用。此外，讨论了使用将调查材料附加到IDT之间的声延迟线的声路径上的技术的最新研究。

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来源
《Zinc Oxide Materials and Devices II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6474》|2007年|647415.1-647415.13|共13页
会议地点 San JoseCA(US)
作者
C. Mueller; A. Nateprov; G. Obermeier; M. Klemm; V. Tsurkan; A. Wixforth; R. Tidecks; S. Horn;
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作者单位

Institut fuer Physik, Universitaet Augsburg, Universitaetstr. 1, D-86159 Augsburg, Germany;

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原文格式 PDF
正文语种 eng
中图分类 TN304.21;
关键词
Surface acoustic wave (SAW) devices; SAW-sensors; materials science with SAW;

机译：表面声波（SAW）设备；声表面波传感器声表面波材料科学;

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4. Improving manufacturability of bulk acoustic wave and surface acoustic wave devices [C] . Mishin Sergey Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2011 Symposium on . 2011

机译：改善体声波和表面声波装置的可制造性
5. Materials and device modeling of zinc oxide/diamond/silicon structures for surface acoustic wave devices. [D] . Hachigo, Akihiro. 1997

机译：用于表面声波器件的氧化锌/金刚石/硅结构的材料和器件建模。
6. Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction [O] . Zhenglin Chen, Qiaozhen Zhang, Sulei Fu, 2021

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7. Development of a high-speed, phase-sensitive laser probe system for RF surface acoustic wave/bulk acoustic wave devices with an absolute vibration amplitude measurement function [O] . Hikaru Takahashi, Tatsuya Omori, Ken-ya Hashimoto 2021

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8. Acoustic-Electric Field Analysis of Multilayered Surface Acoustic Wave Devices [R] . Ghijsen, W. J. 1987

机译：多层声表面波器件的声电场分析

Surface acoustic wave devices

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